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Wafer Fabs Available for Sale!!!

Note: All systems and fabs are subject to availability at time and date of inquiry.

Please feel free to search for the product you came for. Products in this site are Indexed by the FreeFind Search Engine.

This system was received in August - October, 2001 brand new and has only been used for training purposes when initially received ( a total of about 2 hours). Total purchase cost was $142,374.29. Due to a change in product processing, it has never been used outside of training.

Profiler System Details:

• NT-3300 Profiler system with computer
• 8 inch auto XY with 5 urn encoder/autoII
• 0.5X field of view lens
• 2.0X field of view lens
• Quadruple turret motorized operation, position sensing
• IX-10 interferometric objective
• 10 micron step height standard
• Wafer vacuum chuck, 4 inch - 8 inch
• Vacuum switch box

View 1	View 2	View 3	View 4	View 5	View 6	View 7

Won't last!!! Make reasonable offer!!!

If interested,   please click here.

Note: All products are subject to availability at time and date of inquiry.

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New Parts for Novellus Systems

Item #	OEM P/N	Description	Quantity
1	02-0093-00	One Arm Robot	4
2	15-00701-00	Bottom Fork Plate, 150 MM	10
3	15-00703-00	Top Fork Plate, 150 MM	10
4	16-033932-00	Pinned Showerhead Weldment, 150 MM	16
5	16-033931-00	Pinned Showerhead Weldment, 200 MM	16
6	02-029514-01	Left Indexer Assembly	1
7	02-029514-02	Right Indexer Assembly	1

If interested in one or more items,   please click here.

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Semiconductor Equipment and Major Components

Equipment available for sale

• Fusion 200PCU POLO UV cure tool (1997, like new)
• Fusion 200PC UV cure tool, excellent condition
• Leybold MAG400 turbo pump, NEW
• ENI generators, calibrated: OEM 12A, OEM650AXL, OEMTR0A, etc.
• AE RFG Model PDW2200
• M&W single and dual channel chillers, rebuilt
• Ebara dry pump, model 65X40, NEW, $13,900.00
• Drytek mega strip 6, excellent condition
• Flouroware box washer, model 8010, excellent condition
• Rucker and Kolls semi auto prober, model 680A
• Fortrend wafer transfer tool, 6 inch, stainless steel, qty 5

If interested in any or all of the above, please call for details, or please click here. Please specify Reference Code: AM10262L1

Subject to availability at time and date of inquiry.

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Semiconductor or Wafer Fab Equipment for Five Inch Wafers

Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.

Note 2: All equipment are store in clean/humidity-temperature controlled room.

Item #	Ref #	Equipment Name	Manufacturer	Model	Size	Original Acquisition Date
1	S01	G-Line Stepper	Nikon	NSR1505G3A		8803
2	S02	G-Line Stepper	Nikon	NSR1505G3A		8808
3	S03	G-Line Stepper	Nikon	NSR1505G4BK		9303
4	S04	G-Line Stepper	Nikon	NSR1505G4D		8802
5	S05	G-Line Stepper	Nikon	NSR1505G4D		9509
6	S06	G-Line Stepper	Nikon	NSR1505G6E	5,6	9809
7	S07	G-Line Stepper	Nikon	NSR1505G6E	5,6	9109
8	S08	G-Line Stepper	Nikon	NSR1505G7E		9009
9	S09	I-B38Line Stepper	Nikon	NSR1505i7A	5,6	0103
10	S10	Resist Coater and Developer	DNS	SKW-636BVP	5,6	9903
11	S11	Deep UV Curing System	Ushio Electric	UMA-802-H6		8802
12	S12	Deep UV Curing System	Ushio Electric	UMA-802-HC57MS	5,6	9201
13	S13	Character Exposure System	Canon	AIM-630	5,6	8708
14	S14	Lamp Annealing System	DNS	LAW-6L3-A		8801
15	S15	Lamp Annealing System	DNS	LAW-815	5,3	9503
16	S16	Dry Etcher	Tokya Ohka	OAPM-301B		8603
17	S17	Dry Etcher	Tokya Ohka	TCE-2600		9104
18	S18	Dry Etcher	Tokya Ohka	OPM-A1250		8802
19	S19	Dry Etcher	Tokya Ohka	OPM-A1200		8409
20	S20	Dry Etcher	Tokya Ohka	OAPM-A1200		8703
21	S21	Dry Etcher	Alcantec	MAS-801	5,6	9610
22	S22	Dry Etcher	Alcantec	MAS801-HR		0102
23	S23	Dry Etcher (Polysilicon)	Hitachi	M216A-2	5,6	9703
24	S24	Dry Etcher (Polysilicon)	Tokyo Ohka	OAPM-406		9409
25	S25	Dry Etcher (Polysilicon)	Hitachi	M216A-2		9703
26	S26	Dry Etcher (Oxide)	TEL	TE-5000	5,6	9703
27	S27	Dry Etcher (Oxide)	TEL	TE-4000		9703
28	S28	Dry Etcher (Oxide)	TEL	TE-8400S		9703
29	S29	Dry Etcher (Oxide)	TEL	TE-8400PE		9701
30	S30	Dry Etcher (Oxide)	Tokyo Ohka	OAPM-301B		8509
31	S31	Dry Etcher (Oxide)	Anelva	ILD-4003		8509
32	S32	Dry Etcher (Oxide)	Anelva	ILD-4013T		9503
33	S33	Dry Etcher (Metal)	Hitachi	M308AT		9011
34	S34	Plasma Etcher	Tokyo Ohka	OPM-A1200		8503
35	S35	Wafer Scrubber	DNS	SSW-636		9104
36	S36	Wafer Scrubber	DNS	SSW-627		9003
37	S37	Wafer Scrubber	DNS	SSW-629-B		9501
38	S38	Wafer Scrubber	DNS	SSW-636-B	3,4,5,6	8902
39	S39	Implanter (Medium Current)	Nisshin Electric	NH-20S	5,6	9203
40	S40	Implanter (Medium Current)	Nisshin Electric	SPCV1850U116-FL		9508
41	S41	Implanter (High Current)	TEL/VARIAN	80/10		9502
42	S42	Implanter (High Current)	AMAT	PI9500		9506
43	S43	Implanter (High Current)	Nisshin Electric	NH-40SR		9309
44	S44	APCVD	AMJ	AMS-2100	5,6	8709
45	S45	APCVD	AMAYA	AEC-2260	5,6	9505
46	S46	PECVD	ASM	EECVD		8802
47	S47	Sputtering System, Aluminum	TEL/VARIAN	VARIAN-3180		9003
48	S48	Sputtering System, Aluminum	TEL/VARIAN	VARIAN-3180		9403
49	S49	Sputtering System, Aluminum	Tokuda MFG	CCS-1400		8909
50	S50	Diffusion Furnace, Horizontal	TEL	DL-8P-473-SDDC		9304
51	S51	Diffusion Furnace, Horizontal	TEL	DL-8P-473LT-SDDC		9503
52	S52	Mask Aligner	Canon	PLA-501FA		8709
53	S53	Coater Developer	DNS	SKW-636-BV	5,6	9309
54	S54	Coater Developer (Polyimide)	DNS	SCW-524-BVQ	3,4,5,6	8603
55	S55	Developer (Polyimide)	DNS	DVW-423A		8703
56	S56	Curing Oven	Oshitari	SCOX-1300-H		8603

Item #	Ref #	Equipment Name	Manufacturer	Model	Size	Original Acquisition Date
1	K69	Inspection Station	Canon	VIR-600	5,6	8703
2	K70	Wafer Particle Monitor System	Hitachi Deco	IS-1010		8909
3	K71	Wafer Particle Monitor System	Topcon	WM-3		8909
4	K72	Pattern Defect Review System	KLA-TENCOR	KLA2111		0103
5	K73	Pattern Defect Review System	KLA-TENCOR	KLA2131E		9610
6	K74	Overlay Measurement System	KLA-TENCOR	KLA5010		0109
7	K75	Al Film Thickness Measurement System	KLA-TENCOR	M-GAGE20		8509
8	K76	Al Film Thickness Measurement System	KLA-TENCOR	M-GAGE300		9201
9	K77	4 Point Probe	Kokusai Electric	VR-30A		8602
10	K78	Ellipsometer	Rudolph Research	2C.4C		8601
11	K79	Ellipsometer	Rudolph Research	AUTO.EL	4,5,6	8509
12	K80	Ellipsometer	Rudolph Research	SS1,4D		8703
13	K81	Film Thickness Measurement System	NANOMETRICS	NANOSPECT/AFT		9509
14	K82	Film Thickness Measurement System	NANOMETRICS	NANOSPECT/AFT		8603
15	K83	X-ray Analysis System	TECHNOS	TREX610		9309
16	K84	FTIR System	Nicolet Instruments	ECO-8S		8801
17	K85	CD SEM	Hitachi	S-6000	5,6	8808
18	K86	CD SEM	Hitachi	S-7000		9009
19	K87	CD SEM	Hitachi	S-7080		9303
20	K88	CD SEM	Hitachi	S-6200H		9506
21	K89	CD Measurement System	Nikon	LAMPAS-M3	3,4,5,6	8603
22	K90	CD Measurement System	Nikon	LAMPAS-HD	3,4,5,6	9203
23	K91	Inspection Station	Canon	VIR-600	5,6	8603
24	K92	Parametric Test System	Keithley	S350		8503
25	K93	Wafer Particle Monitor System	Hitachi	HILIS-200	4,5,6	8703

If interested in one or more items,   please click here.

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Furnaces or Thin Film Equipment

Item	Model/Description	Qty	Condition
1	SVG 7000 TEOS System, 1993	1	Excellent
2	BTU Apogee +1 Oxide System	2	New, In Crate
3	Gemini II	1	Rebuilt, No Generator
4	Gemini II	1	"As-Is", No Generator
5	Gemini I	1	"As-Is", Touch Screen, No Generator
6	Gemini I	1	"As-Is", No Generator

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Mass Flow Controller Power Supply & Control Unit

Item	Manufacturer	Model/Description	Qty	Condition
1	Brooks Instruments	0152E	8	Excellent

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New Busch Vacuum Pumps

Item	Manufacturer	Model/Description	Qty	Serial No.	CFM	Condition
1	Busch	BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ	1	C0019000142	21	New, no box
2	Busch	BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ	1	PB03680101	250	New in Box

Won't last. Call for highly motivating prices.

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Major Components in Various Semiconductor Equipment

Item	Manufacturer	Model/Description	Qty	Price/Ea	Comments
1	Advanced Energy	MDX 10KW, Mod. No. 3152011-053P, Low-Z, Slave, Power Supply, S/N's: 115811 & 115812	2	$6,500.00	New, in boxes, SN 115812 SOLD
2	Brooks Automation	Eight inch (8") Vacuum Cassette Elevator, Type VCE-2-0, Assembly, ortogonal, 4 right hand & 4 left hand	8	$8,500.00	New
3	CTI Cryogenics	On-Board 8F Cryopump, Part No.: 8116021G001, S/N: PK9534124, Roughing Valve, Purge Valve: P/N 8112095; Input 40-80 PSI, VCR TC Gauge: P/N 8112105, Control Module	1	$7,000.00	New, in box, in plastic, with manual
4	CTI Cryogenics	On-Board 8F Cryopump, Part No.: 8116021G002, S/N: PF9637760, Fast Regen Control Sputtering Module PC2 87F9613888, POS 2 PF9637760, Roughing Valve, Purge Valve: P/N 8112095G001; Input 40-80 PSI, TC Gauge - VCR	1	$6,500.00	New, in box
5	CTI Cryogenics	On-Board 8 Waterpump, Part No.: 8120900, S/N: AF221829, Roughing Valve: P/N 8112085; Input 60-80 PSI, Purge Valve: P/N 8112095; Input 40-80 PSI TC Gauge - VCR: P/N 8112105, "W" Control Module	1	$2,700.00	No longer available
6	CTI Cryogenics	On-Board 8F High Vacuum Pump, P/N: 8112906G001, S/N: BH222268, Roughing Valve: P/N 8112197; Input 60-80 PSI, TC Gauge - VCR: P/N 8112105	1	$2,300.00	No longer available
7	CTI Cryogenics	On-Board 8 Cryopump, P/N: 8112-856, S/N: AJ9120804, Purge Valve: P/N 8112095, Input 40-80 PSI, Control Module,	1	$2,000.00	No longer available
8	CTI Cryogenics	On-Board Cryopump, P/N: 8112-856, S/N: AE120035, Roughing Valve: P/N 8112085, Input 60-80 PSI; Purge Valve: P/N 8112095, Input 40-80 PSI, Control Module,	1	$2,000.00	No longer available
9	CTI Cryogenics	On-Board Series Network Interface Terminal, P/N: 8113022G002, S/N: 74G920214	1	$500.00	Used, no box, no manual
10	Emcor Products, Crenlo, Inc.	Emcor 10 Series vertical electronic enclosures, 19-1/16" panel width x 26-5/16" depth x 70-1/8" vertical opening height	8	$500.00	New, in boxes
11	Emcor Products, Crenlo, Inc.	Emcor 10 Series vertical electronic enclosures, 24-1/16" panel width x 31-9/16" depth x 70-1/8" vertical opening height	8	$600.00	New, in boxes
12	Leybold	Turbo Vac Pump, Model 89489	1	$4,000.00	No longer available
13	Osaka Vacuum	Model TC 440 Power Supply, S/N's: A106515-5, A106515-6, A050520-19, & A101711-20	4	$1,250.00	All new, in box, with manual
14	Osaka Vacuum	Model TC 440 Power Supply, S/N A096822-27	1	$1,250.00	New, in box, no manual
15	Osaka Vacuum	Model TC 440 Power Supply, S/N AD56084-12	1	$500.00	Used, no box
16	Pfeiffer Balzers	Type TPU 450 H Pump, DN 160 C F-F, PM P01 770/P341B	1	$2,800.00	No longer available
17	Pfeiffer Balzers	Type TPH 060 Pump, DN 63 ISO-K, PM P01 400/M3275	1	$1,250.00	No longer available >
18	Pfeiffer Balzers	Type TPH 060 Pump, DN 63 ISO-K, PM P01 400/M1588	1	$1,250.00	No longer available
19	Pfeiffer Balzers	Type TPH 060 Pump, DN 63 ISO-K, PM P02 090/P317	1	$1,250.00	No longer available
20	Seiko-Seiki	Model No. STP-H1000C 0411	1	$Call	Like new, no box, no manual
21	RF Power Products	LF10, 1000 watt, 50-460 KHz Variable Frequency RF Generator, Model 7520426015 LF10 SE 134, S/N L1946	1	$4,000.00	New, in box
22	RF Power Products	RF5S, 500 watt, 13.56 MHz RF Generator, S/N S1296-10434	1	$2,000.00	No longer available
23	VAT	Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")	5	$1,200.00	New, in boxes, sealed in plastic, with manuals
24	VAT	Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")- S/N F20-83298/0059, File No. 20044-PA24-1006	5	$1,200.00	New, in boxes, sealed in plastic, with manuals
25	VAT	Series 20 Vatterfly Valve, Manual Actuator, Double acting pneumatic actuator, Model DN 63-160 (I.D. 2-1/2" - 6")- S/N F20-83298/0052, File No. 20044-PA24-1006	1	$1,000.00	Like new, in box, not sealed in plastic, with manual
26	VAT	Series 02, Rectangular Gate Valve MONOVAT, Double acting pneumatic actuator, S/N F02-106361/82, File No. 02010-BA24-1008, 1997	1	$1,800.00	New, in box, sealed in plastic, with manual, GONE
27	VAT	Series 02, Rectangular Gate Valve MONOVAT, Double acting pneumatic actuator, S/N F02-75092/1, File No. 02010-AA24-X, 1997	1	$2,000.00	New, in box, sealed in plastic, with manual
28	VAT	S/N F02-106361/90, File No. 02010-BA24-1008, 1997	1	$750.00	Like new, not in box, sealed in plastic, no manual, SOLD
29	VAT	S/N F02-84060/0003, File No. 02010-AA24-1006, 1995	1	$450.00	Like new, in box, no manual
30	VAT	S/N F02-86358/0068, File No. 02010-BA24-1008, 1996	1	$450.00	No longer available
31	VAT	S/N F02-84887/0019, File No. 02010-BA24-1008, 1995	1	$450.00	No longer available
32	VAT	S/N F02-79433/0014, File No. 02010-CA24-1002, 1995	1	$450.00	Used
33	VAT	Model VF3243	1	$200.00	Used

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Detailed Mass Flow Controllers

Item	Manufacturer	Model	Details	Qty	Comments	Click Image for Photo
1	Horiba	SEC-7340MO-SUC-369	Gas - He, Flow Range - 6 SLM, Fittings - ¼" VCR, Male I/O	1	Like New
2	Horiba	SEC-7340MC-271	Gas - O2, Flow Range - 5 SLM	1	Like New
3	Unit Instruments	UFC-1200A	Gas - HBR, Flow Range - 300 SCCM	1	Plastic Packed with Calibration Data Sheet. Three of same condition available. Please see table below.
4	Unit Instruments	UFC-1260A	Gas - CL2, Flow Range - 50 SCCM	1	Metal Seals. Like New.
5	MKS	1150B-158K-SP014-90	Gas - TEOS, Flow Range - 50 SCCM	1	Condition Unknown.
6	Tylan	Source VI	Carrier: 20 SLM, H2; Source: 100 GR/MIN SIHCL4; Ratio: 200%; TEMP 21º C	2	This unit can be purchased rebuilt or "as-is".

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Mass Flow Controllers with Gas and Ranges Specified

Item	Manufacturer	Model	Qty	Gas	Range	Comments
1	Unit Instruments	UFC-1200A	2	HBR	300 SCCM	Packed with Calibration Data Sheets by Manufacturer. In box. See item 3 above for photo.
2	Unit Instruments	UFC-1200A	1	BCL3	200 SCCM	Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
3	Unit Instruments	UFC-1200A	1	O2	10 SCCM	Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
4	Unit Instruments	UFC-1200A	1	CF4	20 SCCM	Like New.
5	Unit Instruments	UFC-1201A	1	O2	10 SCCM	Like New.
6	Unit Instruments	UFC-1201A	1	N2	10 SCCM	Like New.
7	Unit Instruments	UFC-1260A	1	CL2	50 SCCM	Like New. See item #4 above for photo.

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Other Equipment with Photo

Item	Manufacturer	Model	Details	Qty	Comments	Click Image for Photo
1	Thermcraft, Inc.	Mdl: 2158-6-1ZH, S/N 884-11	Watts - 1030, Volts - 115/230, AMPS - 9/45, MAX TEMP - 1200	1	Imcomplete. Equipped with MDOT J.C. Schumacher source. Please see photo.
1	N/A	Custom	Manual basic vacuum system with 340 type turbo pump, roughing pump, valve system, and turbo pump and ionization gauge controllers. Can be customized.	1	Please see photo.

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Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

• 3M Satin Finishing Material
• Stainless steel material for 3/32" shank and related parts
  • Specifications:
    • 7/8 X 3/8 X 3/32
    • 7/8 X ¼ X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.

If interested,   please click here.

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If interested in one or more items,   please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.

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Please contact us at:

OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

E-mail: webmaster@semiconweb.com

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C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment | C15: Parts & Semiconductor Back End Equipment | C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment | C18: He Leak Detectors, Vac Pumps, Turbo Balancing System | C18a: Vac Pumps, Semiconductor Equipment, Measurement System | C19: Helium Leak Detectors, RF Generator, Turbo Balancer | C20: Wafer Fab Equipment, Novellus Parts, Etc. | C21: Leybold Converters and Turbo Pumps | C22: Rebuilt Helium Leak Detectors & Vacuum Pumps | C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc | C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online

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