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Wafer Fabs Available for Sale!!!

Note: All systems and fabs are subject to availability at time and date of inquiry.

The following information is provided as a good faith representation of the equipment described. No warranty of the information or equipment is intended nor implied.

The system consists of three major components as follows:

• a. Cylindrical ported Glove Box
• b. Large Roughing Pump
• c. Smaller Pump: Blower/Booster Filter Chamber

The Pumps and valving are from Leybold-Heraeus or of other high quality manufacturer.

The Complete Assembly consists of a large cylindrical vacuum or inert atmosphere glove box with two vacuum or gas transfer pumps. [The following information is provided in good faith, but is not warranted as accurate. All offers should be made on an "As-Is, Where Is" basis. Crating, shipping and insurances are the responsibility of buyer.]

A. Glove Box

The basic unit is a large cylindrical stainless steel (304 SS) vacuum -- atmospheric chamber. Internal dimensions of the main chamber are 36 inches ID by 72 inches in length, plus the dish ends. The walls are a nominal 0.5 in. thick. (present concensus)

There are four (4) glove ports with quick closing covers and three (3) one foot viewing ports on each side. The top is fitted with two additional skylight lamp ports, permitting a variety of lighting conditions or internal lighting changes using external light sources.

One large end dish is flanged, gasketed and hinged. It opens easily and swings clear (~160 degrees) to provide a full diameter entry port. The hand cranked locking device and handles permit easy opening and closing by one person. The center of this dish is fitted with a six inch flanged pipe fitting, used as the access port for laser, e-beam welder, etc.. The flange is standard and can be blanked off if required (blank not provided).

The feed end of the glove box is equipped with a 24 inch long materials transfer port. This section has an internal sliding tray for quick placement or removal of "samples". This end of the glove box is also fitted with the valving and instrumentation ports for control and monitoring of the atmosphere within the chamber.

The unit is supported by pipe legs braced with angle. The angle provides a lifting point for standard forklift blades, making moving of the unit relatively easy. The support places the glove and viewing ports at a convenient working height. The exterior of the unit is painted light blue.

The glove box and pumps saw only limited use with inert gases, and the unit is in excellent condition. The interior of the unit is unpainted. There is no corrosion evident. The unit has been in a clean laboratory environment since manufacture, and in storage the past several months. Age is estimated at 30-35 years.

B. LARGE VACUUM PUMP FOR GLOVE BOX

The following includes data from nameplates attached to the units:

• Heraeus Hoch Vakuum, GmbH, Hanau
• Model/Type DK 180
• 118 CFM
• Fabr #18006921

• Motor - USEL, 5hp 3ph
• 220v14A/440v7A
• 215C, Type JV
• DSSN -B, Code H
• 1800 rpm, Cont. rating
• SN# 4067361

C. SMALLER VACUUM PUMP/Blower-Booster FOR GLOVE BOX

• Leybold-Heraeus, Model T-WS500
• Kat Nr. 16406, Fabr Nr. 54357
• Einstall BE, 4 BIS 40
• Cat # 11631, 04032046
• D-mot 019, # 1151546
• 220/380v 3.6/2.1A; 220/440v 3.6/2.5A
• 1.3/1.6 KW alpha
• 15L.KLFP33

D. SMALL COMPONENTS ATTACHED TO GLOVE BOX:

Mostly L-H or Heraeus fittings and connectors

Worcester valve on Glove Box 3:V416TB:151
720_WOG_R5 (ball valve), "Better by Design"

Thermocouple vacuum gauge on Glove Box
NRC, National Research Corp, div of Norton
Type 501

The above vacuum system has a large Cylindrical Glove Box, stainless steel 0.5 in walls, 36 in diam (truncated floor) by 72 inch obstruction free interior.

This is a remarkable Tool for R&D or controlled atmosphere production operations. The Glove Box has four glove ports and three viewing windows on each side. Each glove port can be capped and sealed or opened for use in less a minute. Three top ports permit changing interior lighting intensity or type without disturbing the atmospheric seals.

The unit is constructed of stainless steel, 304/316. All fittings are high quality including many standard Leybold-Heraeus components.

Versatility is built in, permitting operation under controlled low pressure (near vacuum) conditions, an exotic gas atmosphere, or even slightly elevated pressure (with the glove ports capped).

A large L-H pump (120 CFM) and an L-H booster control the gas transfers, permitting rapid changes in interior conditions. Pump manuals are available with the unit.

A large hinged domed cap at one end permits full throat (3 ft diam) access. The dome can be opened in a minute or less; no tools required. This permits rapid hands-on placement of target materials. When open, this door is unimpeded, permitting immediate manned entry for maintenance, clean up, or modification.

The opposite entrance has a smaller full opening quick open door with a sliding parts/tools tray. This permits rapid feeding of components for assembly or for removing completed units.

Top entry ports and convenient exterior plugs are installed for gas addition, welding cables, thermocouples and other instrumentation.

The unit is in excellent condition. It has seen minimal use ina human-occupancy safe environment. Replacement value estimated at $75,000.00.

Photos (.jpg) are avaialbe on request for serious consideration. Please contact us by phone or e-mail for details and pricing or try reasonable offer..

Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

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Semiconductor Equipment Resource Center

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