Semiconductor Equipment: Elipsometers, Particle Counter, Probe Station, Auto Scriber, and more
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Eight (8") Semiconductor Equipment, Refurbished KLA/TENCOR Systems, & Parts
All equipment listed below are sold "as-is", "where-is" basis and are subject to prior sale or availability at date of inquiry.
Item
Manufacturer
Model
Description
Condition
Qty
Price Each, US$
1
Asyst
ARM 2200-V1315
SMIF Loader
New, never used
25
Reasonable Offers
2
Asyst
ARM 220-V1316
SMIF Loader
New, never used
25
Reasonable Offers
3
Asyst
MSC 6610
MSC Box
New, never used
25
Reasonable Offers
4
AG
8108
8108 with multiple 8800 upgrades
Good
2
Please call.
5
ASML
ASML 60
Good
2
Please call.
6
ASML
ASML 80
Good
4
Please call.
7
Genus
8720 W CVD
Tungsten Deposition
Good
5
Please call.
8
Kensington
Autoscope
Metrology
Good
3
Please call.
9
KLA/Tencor
FT 650
Film Thickness
Good
2
Please call.
10
KLA/Tencor
SFS 7700
Pattern Inspection System
Good
2
Please call.
11
LAM
4608
Metal RIE
Good
6
Please call.
12
AME
5000 CVD
.03 dep/.01 etch
Good
5
Please call.
13
Neslab
RTE-134A MP
Pyro Chiller
Good
1
Reasonable Offer
14
Neslab
Heat Exchanger
Good
1
Reasonable Offer
15
SVG
SVG 90
Track
Good
4
Please call.
16
SVG
VTR 7000
Nitride
Good
1
Please call.
17
Strasbaugh
6DSSP
Good
5
Please call.
18
Strasbaugh
6DSSP
In Operation
Good
6
Please call.
19
Ultrapointe/KLA
1010
Metrology
Good
2
Please call.
20
Varian
M2000
.04 dep. / .01 etchback chamber
Good
2
Please call.
21
Varian
M2000
Missing some parts
Spare System
1
Please call.
22
KLA/Tencor
4500
Metrology
OEM Specs
1
Please call.
23
KLA/Tencor
6220
Metrology
OEM Specs
1
Please call.
24
KLA/Tencor
6420
Metrology
OEM Specs
1
Please call.
25
PMS
3600
Metrology
OEM Specs
1
Please call.
26
Cannon
EX 4
In clean room available for inspection
Good
5
27
Canon
EX 5
In clean room available for inspection
Good
5
28
KLA/Tencor
SP1
Metrology, 1998
Excellent
1
Please call.
29
KLA/Tencor
SP1-TB1
Metrology, 2001, brand new in crate
Never uncrated
1
Please call.
30
KLA/Tencor
6420
Metrology / Refurbished
OEM Specs
1
Please call.
31
KLA/Tencor
SP1
Metrology, "as-is"
Excellent
1
Please call.
Note: Support and installation services for KLA/Tencor equipment are available and performed by factory trained Field Service Engineers. Please call or click here to email request for details.
Semiconductor Equipment: Elipsometers, Particle Counter, Probe Station, Auto Scriber, Etc.
Rudolph Auto Ellipsometers Model EL III and Model EL II
The Auto-el III is in "LIKE NEW" condition and has the 3 axis automatic stage with joystick control. It comes with stds. And manuals.
The Auto-el II is in very nice condition, has the square stage and also comes with the startup std. And maintenance kit.
Tencor Surfscan, SFS-364
Surface particle counter. Measures wafers up to 150mm as well as masks. Comes with manuals. Very Nice condition. 1990
Micromanipulator 6000 Probe Station
The tool has the Bausch and Lomb microscope on it and comes with 4 magnetic probes (110) with 7B probe tips (.020"). It's currently outfitted with a 100mm chuck. It also comes with a few extras including an ESI (Electro Scientific Industries) model 1700 digital converter with 1701 ohmeter, 20-200 meg-ohm range.
Karl Suss Auto Scriber, RA-120
With manual. Taking offers.
Yield Engineering (YES-3), vapor prime oven.
Like New!!!
Samco UV/Ozone Stripper Model UV-1
Like New!!!
Semiconductor Equipment wafer expander
Model 2600. Taking offers!!!
SemiGas two tank gas cabinet
The unit is complete with plumbing, regulators, electronics, and scales. It was only used for 6-12 months and was used for Chlorine and BCL3. It has GSM5 (Gas Safety Monitoring) controllers with remote programming units, safety interlocks, etc. . . The unit is in "LIKE NEW" condition and has the glass sliding window in front for easy viewing of gas bottle environment conditions.
All of the above equipment are being sold on "as-is", "where-is" basis. However, they are in if not mint, near mint condition. They are stretch wrapped and moisture protected. They are in dry storage and available for inspection. Subject to availability upon inquiry.
Semiconductor Equipment and Major Components
Equipment available for sale:
Fusion 200PCU POLO UV cure tool (1997, like new)
Fusion 200PC UV cure tool, excellent condition
Leybold MAG400 turbo pump, NEW
ENI generators, calibrated: OEM 12A, OEM650AXL, OEMTR0A, etc.
AE RFG Model PDW2200
M&W single and dual channel chillers, rebuilt
Ebara dry pump, model 65X40, NEW, $13,900.00
Drytek mega strip 6, excellent condition
Flouroware box washer, model 8010, excellent condition
Rucker and Kolls semi auto prober, model 680A
Fortrend wafer transfer tool, 6 inch, stainless steel, qty 5
If interested in any or all of the above, please call for details, or please click here. Please specify Reference Code: AM10262L1
Subject to availability at time and date of inquiry.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
Comments
Price
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
Installed and tested but used only 1 or 2 times.
Please call.
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
In good working order.
Please call.
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
Like New
Please call.
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
Installed and working fine. Never used.
Please call.
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
Works great. On chamber has a fair sized vacuum leak.
Please call.
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
Works great. New Edwards pumps.
Please call.
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
Great condition.
Please call.
8
Tamarack
T-300
Photo Lithography Tool, Exposure System
208V/15A
67W X 59D X 103H
Like New
Please call.
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
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OLM Enterprises Semiconductor Equipment Resource Center