Semiconductor Equipment, High Vacuum Systems, and Photo Lithography
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!!
Capacity: 15 thousand wafers/mo, .8 um, CMOS
Please click here.
5 Inch Wafer Fab Equipment Available!!!
Please click here for list.
6 Inch Wafer Fab Line Available!!!
Capacity: 20 thousand wafers/mo, .5 um, CMOS
Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
Please feel free to search for the product you came for. Products in this site are Indexed by the FreeFind Search Engine .
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Please click on the image below for MFC and some related equipment photos and specs:
Used High Vacuum System, Evaporator
NRC Thermal Evaporator
Approximately 18" X 30" Pyrex Glass Belljar with Power Lift and Guard
10" Powered Spinner for fisturing and rotating
Varian VHS-6 Diffusion Pump System, 2400 lps pumping speed
Varian Liquid Nitrogen Cold Trap, Mdl 316-4 LN2
Welch 1397 Mechanical Pump, 17.7 CFM, 2-Stage, 1 HP, Single Phase
6" Aluminum Air Operated Gate, Foreline, and Roughing Valves
Varian Millitorr Gauge 801
Parts Missing:
Ion Gauge Controller and Tube
KHF Throttle Valve Controller
Auto Valve Sequencer
Omni III Thickness Monitor
Please click on the images to see photo:
NRC Thermal Evaporator
If interested, please click here
Used or Surplus Balzers Sputtering Box Coater
Balzers Sputtering System
System is composed of:
Pumping System
Control Cabinet
RF Power Supply
Cryo Pump
Please click on the images to see photos:
If interested, please click here
Used or Pre-owned Bruker Reflex Mass Spectrometer
System Model TOF Time of Flight, Serial Number FM 0905
System includes:
Two (2) Balzers Turbo Pumps, Mdl TPU-240
Two (20 Balzers TCP-121 Controllers with cables
Turbo Vent Valves and a KF-25 bellows
Two (2) Balzers Mechanical Pumps, Mdl DUO-0008 with molecular sieve filters and TC Tubes, Mdl TPR 010
New Wave Research Laser, Mdl Mini Laser-10, Serial Number 5082 April 1995
Panasonic Digital Camera, Mdl WVCL352
VAT Vacuum Valve F10-76710-01
SS Balzers IG Tubes Type IKR 020
Note: No controllers included.
Please click on the images to see photos:
If interested, please click here
Detailed Mass Flow Controllers
Item
Manufacturer
Model
Details
Qty
Comments
Click Image for Photo
1
Horiba
SEC-7340MO-SUC-369
Gas - He, Flow Range - 6 SLM, Fittings - ¼" VCR, Male I/O
1
Like New
2
Horiba
SEC-7340MC-271
Gas - O2, Flow Range - 5 SLM
1
Like New
3
Unit Instruments
UFC-1200A
Gas - HBR, Flow Range - 300 SCCM
1
Plastic Packed with Calibration Data Sheet. Three of same condition available. Please see table below.
4
Unit Instruments
UFC-1260A
Gas - CL2, Flow Range - 50 SCCM
1
Metal Seals. Like New.
5
MKS
1150B-158K-SP014-90
Gas - TEOS, Flow Range - 50 SCCM
1
Condition Unknown.
6
Tylan
Source VI
Carrier: 20 SLM, H2; Source: 100 GR/MIN SIHCL4; Ratio: 200%; TEMP 21º C
2
This unit can be purchased rebuilt or "as-is".
Mass Flow Controllers with Gas and Ranges Specified
Item
Manufacturer
Model
Qty
Gas
Range
Comments
1
Unit Instruments
UFC-1200A
2
HBR
300 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. See item 3 above for photo.
2
Unit Instruments
UFC-1200A
1
BCL3
200 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
3
Unit Instruments
UFC-1200A
1
O2
10 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
4
Unit Instruments
UFC-1200A
1
CF4
20 SCCM
Like New.
5
Unit Instruments
UFC-1201A
1
O2
10 SCCM
Like New.
6
Unit Instruments
UFC-1201A
1
N2
10 SCCM
Like New.
7
Unit Instruments
UFC-1260A
1
CL2
50 SCCM
Like New. See item #4 above for photo.
Other Equipment with Photo
Item
Manufacturer
Model
Details
Qty
Comments
Click Image for Photo
1
Thermcraft, Inc.
Mdl: 2158-6-1ZH, S/N 884-11
Watts - 1030, Volts - 115/230, AMPS - 9/45, MAX TEMP - 1200
1
Imcomplete. Equipped with MDOT J.C. Schumacher source. Please see photo.
1
N/A
Custom
Manual basic vacuum system with 340 type turbo pump, roughing pump, valve system, and turbo pump and ionization gauge controllers. Can be customized.
1
Please see photo.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
3M Satin Finishing Material
Stainless steel material for 3/32" shank and related parts
Specifications:
7/8 X 3/8 X 3/32
7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested please click here.
New Parts for Novellus Systems
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Semiconductor or Wafer Fab Equipment for Five Inch Wafers
Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.
Note 2: All equipment are store in clean/humidity-temperature controlled room.
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
S01
G-Line Stepper
Nikon
NSR1505G3A
8803
2
S02
G-Line Stepper
Nikon
NSR1505G3A
8808
3
S03
G-Line Stepper
Nikon
NSR1505G4BK
9303
4
S04
G-Line Stepper
Nikon
NSR1505G4D
8802
5
S05
G-Line Stepper
Nikon
NSR1505G4D
9509
6
S06
G-Line Stepper
Nikon
NSR1505G6E
5,6
9809
7
S07
G-Line Stepper
Nikon
NSR1505G6E
5,6
9109
8
S08
G-Line Stepper
Nikon
NSR1505G7E
9009
9
S09
I-B38Line Stepper
Nikon
NSR1505i7A
5,6
0103
10
S10
Resist Coater and Developer
DNS
SKW-636BVP
5,6
9903
11
S11
Deep UV Curing System
Ushio Electric
UMA-802-H6
8802
12
S12
Deep UV Curing System
Ushio Electric
UMA-802-HC57MS
5,6
9201
13
S13
Character Exposure System
Canon
AIM-630
5,6
8708
14
S14
Lamp Annealing System
DNS
LAW-6L3-A
8801
15
S15
Lamp Annealing System
DNS
LAW-815
5,3
9503
16
S16
Dry Etcher
Tokya Ohka
OAPM-301B
8603
17
S17
Dry Etcher
Tokya Ohka
TCE-2600
9104
18
S18
Dry Etcher
Tokya Ohka
OPM-A1250
8802
19
S19
Dry Etcher
Tokya Ohka
OPM-A1200
8409
20
S20
Dry Etcher
Tokya Ohka
OAPM-A1200
8703
21
S21
Dry Etcher
Alcantec
MAS-801
5,6
9610
22
S22
Dry Etcher
Alcantec
MAS801-HR
0102
23
S23
Dry Etcher (Polysilicon)
Hitachi
M216A-2
5,6
9703
24
S24
Dry Etcher (Polysilicon)
Tokyo Ohka
OAPM-406
9409
25
S25
Dry Etcher (Polysilicon)
Hitachi
M216A-2
9703
26
S26
Dry Etcher (Oxide)
TEL
TE-5000
5,6
9703
27
S27
Dry Etcher (Oxide)
TEL
TE-4000
9703
28
S28
Dry Etcher (Oxide)
TEL
TE-8400S
9703
29
S29
Dry Etcher (Oxide)
TEL
TE-8400PE
9701
30
S30
Dry Etcher (Oxide)
Tokyo Ohka
OAPM-301B
8509
31
S31
Dry Etcher (Oxide)
Anelva
ILD-4003
8509
32
S32
Dry Etcher (Oxide)
Anelva
ILD-4013T
9503
33
S33
Dry Etcher (Metal)
Hitachi
M308AT
9011
34
S34
Plasma Etcher
Tokyo Ohka
OPM-A1200
8503
35
S35
Wafer Scrubber
DNS
SSW-636
9104
36
S36
Wafer Scrubber
DNS
SSW-627
9003
37
S37
Wafer Scrubber
DNS
SSW-629-B
9501
38
S38
Wafer Scrubber
DNS
SSW-636-B
3,4,5,6
8902
39
S39
Implanter (Medium Current)
Nisshin Electric
NH-20S
5,6
9203
40
S40
Implanter (Medium Current)
Nisshin Electric
SPCV1850U116-FL
9508
41
S41
Implanter (High Current)
TEL/VARIAN
80/10
9502
42
S42
Implanter (High Current)
AMAT
PI9500
9506
43
S43
Implanter (High Current)
Nisshin Electric
NH-40SR
9309
44
S44
APCVD
AMJ
AMS-2100
5,6
8709
45
S45
APCVD
AMAYA
AEC-2260
5,6
9505
46
S46
PECVD
ASM
EECVD
8802
47
S47
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9003
48
S48
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9403
49
S49
Sputtering System, Aluminum
Tokuda MFG
CCS-1400
8909
50
S50
Diffusion Furnace, Horizontal
TEL
DL-8P-473-SDDC
9304
51
S51
Diffusion Furnace, Horizontal
TEL
DL-8P-473LT-SDDC
9503
52
S52
Mask Aligner
Canon
PLA-501FA
8709
53
S53
Coater Developer
DNS
SKW-636-BV
5,6
9309
54
S54
Coater Developer (Polyimide)
DNS
SCW-524-BVQ
3,4,5,6
8603
55
S55
Developer (Polyimide)
DNS
DVW-423A
8703
56
S56
Curing Oven
Oshitari
SCOX-1300-H
8603
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
K69
Inspection Station
Canon
VIR-600
5,6
8703
2
K70
Wafer Particle Monitor System
Hitachi Deco
IS-1010
8909
3
K71
Wafer Particle Monitor System
Topcon
WM-3
8909
4
K72
Pattern Defect Review System
KLA-TENCOR
KLA2111
0103
5
K73
Pattern Defect Review System
KLA-TENCOR
KLA2131E
9610
6
K74
Overlay Measurement System
KLA-TENCOR
KLA5010
0109
7
K75
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE20
8509
8
K76
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE300
9201
9
K77
4 Point Probe
Kokusai Electric
VR-30A
8602
10
K78
Ellipsometer
Rudolph Research
2C.4C
8601
11
K79
Ellipsometer
Rudolph Research
AUTO.EL
4,5,6
8509
12
K80
Ellipsometer
Rudolph Research
SS1,4D
8703
13
K81
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
9509
14
K82
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
8603
15
K83
X-ray Analysis System
TECHNOS
TREX610
9309
16
K84
FTIR System
Nicolet Instruments
ECO-8S
8801
17
K85
CD SEM
Hitachi
S-6000
5,6
8808
18
K86
CD SEM
Hitachi
S-7000
9009
19
K87
CD SEM
Hitachi
S-7080
9303
20
K88
CD SEM
Hitachi
S-6200H
9506
21
K89
CD Measurement System
Nikon
LAMPAS-M3
3,4,5,6
8603
22
K90
CD Measurement System
Nikon
LAMPAS-HD
3,4,5,6
9203
23
K91
Inspection Station
Canon
VIR-600
5,6
8603
24
K92
Parametric Test System
Keithley
S350
8503
25
K93
Wafer Particle Monitor System
Hitachi
HILIS-200
4,5,6
8703
If interested in one or more items, please click here.
Semiconductor Equipment, High Vacuum Systems, and Photo Lithography - C2
Item
Manufacturer
Brief Description
Qty
1
Applied Materials
AME-8110/8130 Plasma Etcher
1 Ea
2
Applied Materials
AME-2100 APCVD Silox Reactor
1 Ea
3
Applied Materials
AMS-7600/7800 RP EPI REACTOR
1 Ea
4
APT
Etcher, Model 9145
1 Ea
5
ASM
SF-50, 8" System, Single Tube PECVD
1 Ea
6
ASM
Plasma III, LDM Dual Tube with PRI-5000 Loader
1 Ea
7
BTU/BRUCE
Furnace BDF4 with 7351C Controller
1 Ea
8
Canon
Aligner, PLA-501F/FA, 3", 4" and 5" Configuration
4 Ea
9
Drytek
DRIE-100 Plasma Etcher
4 Ea
10
Eaton
Nova 10-80 Hi-Current Implanter
1 Ea
11
Electroglas
2001X Prober
1 Ea
12
Fairchild
Sentry-21 VLSI Tester
2 Ea
13
Karl-Suss
MA-56, Aligner, Setup for 3" Wafer
1 Ea
14
Keithley
S386, Omega Four-Point Probe
1 Ea
15
Lam Research Corp.
Lam 790 Etcher
1 Ea
16
Lumonics
Laser Wafer Mark III, Up to 8" Wafer
2 Ea
17
Lumonics
Laser Wafer Mark II, Up to 6" Wafer
1 Ea
18
Micromanipulator
MM 6000, Manual, Probe with 6" Chuck
1 Ea
19
Micromanipulator
MM 6200, Set up with HP-4145A, Computer and Printer
1 Ea
20
Nanometrics
Nanospec210/215/212 with Autoloader
1 Ea
21
Nikon
Optiphot 66, Microscope
1 Ea
22
Pacific Western System
PWS PII Prober
5 Ea
23
Poly-Flow
Vertical and Horizontal Tube Cleaner
1 Ea
24
Prometrix
SM200E, Film Thickness Mapping System
1 Ea
25
Schumacher
TCA Bubbler, New
1 Ea
26
SVG
8800/8600/8100, Any Configuration
1 Ea
27
Solitec
4110-C Four Head Manual Coater
1 Ea
28
Tegal
900E/901E/903E Plasma Etcher
12 Ea
29
Tegal
421 Plasma Stripper
1 Ea
30
Tektronix
576 Curve Tracer, Calibrated
4 Ea
31
Tencor
AlphaStep 200, Calibrated
1 Ea
32
Tencor
4500 Surfscan, Calibrated
1 Ea
33
Tencor
M-Gauge 300
1 Ea
34
Thermco
Furnace, 4300 with Analog Controller
3 Ea
35
Thermco
Furnace, 4300 with TMX 9002 Controller
2 Ea
36
Ultratech
Model 608, Mask Cleaner
1 Ea
37
Varian
350D/CF-3000/CF$/DF4 Ion Implanter
1 Ea
38
Varian
3190 Sputtering System, Set up for 4" Wafer
1 Ea
39
Yield Engineering System
YES-5 HMDS Oven
1 Ea
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
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OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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OLM Enterprises Semiconductor Equipment Resource Center
Copyright ©1999 OLM Enterprises