Back End Fab Equipment & Parts, Dicing Saws, Six Inch (6") Semiconductor or Wafer Fab Equipment, MSGrp1
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!! Please click here.
5 Inch Wafer Fab Equipment Available!!! Please click here for list.
6 Inch Wafer Fab Line Available!!! Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
Please feel free to search for the product you came for with the search engine below:
To see photos or pictures of other equipment and parts, please click here.
Rebuilt Micro Automation Dicing Saws
If interested in one or both of the items above, please click here.
Back End Semiconductor Equipment and Parts
Equipment List
Item
Manufacturer
Model
Description
Age
Serial #
1
AMI3100 Parts
Spare Parts & Modules for AMI3100A
N/A
2
Disco Corporation
DFD 2S/8
Dicing Saw, Fully Automatic
12
DR 1135
3
MCT (Aseco Corporation)
MCT3608A6
600Mil Test Handler
4
Multitest GMBH & Co. Kg
MT9105
TQFP Test Handlers
6
5
Multitest GMBH & Co. Kg
MT9105 Spares
Handler Spare Parts
6
Symtek Systems, Inc.
7936HC-5
PDIP Test Handler
4256
7
Symtek Systems, Inc.
7192C
Burn In Oven w/ 9308 Test Socket
18
8
TOKYO SEIMITSU CO., LTD
APM60A
Automatic Test Probers
11
9
Exclusive Design Company, Inc.
EDC-M400
Substrate Cleaner
10
DISCO CORPORATION
DFG83H/6
Wafer Back Grinder
14
GA0396
11
LTX Corporation
TS80 Modules
LTX77 Modules
12
Buehler (USA)
Isomet TM+
Precision Dicing Saw
435-ISP-481
13
TOKYO SEIMITSU CO., LTD
APM5000
Semi-Automatic Test Probers
14
TOKYO SEIMITSU CO., LTD
APM90A
Automatic Test Probers
5
F01045GM
15
DISCO CORPORATION
2H6T
Disco Dicing Saw 2H6T
13
DD6637
16
MCT (Aseco Corporation)
506274
MCT2020 Pogo pins spherical head for PEC
17
ESEC Group
2006PI
Die Attach Bonder
9
2006726-7-21
18
Sun Microsystems, Inc.
GDM1962B
21" Workstation Monitor
4
19
Mitutoyo
PJ 300
Profile Projector
170148
20
MCT (Aseco Corporation)
92F9006(ETP28B)
MCT2020 Ethernet Super Slim IO base-T transceiver
21
MCT (Aseco Corporation)
116820
MCT2020 Dual Timing Generator Boards
22
MCT (Aseco Corporation)
116325
MCT2020 Functional Sequencer Boards
23
MCT (Aseco Corporation)
116800
MCT2020 AC Parametric Board
24
MCT (Aseco Corporation)
116477
MCT2020 PED Cards
25
MCT (Aseco Corporation)
504529
MCT2020 Blank Disks/MCT Master Disk
26
MCT (Aseco Corporation)
106777/105777
MCT2020 Handle Prober Int'f Bd (HPIB)
27
MCT (Aseco Corporation)
105739
MCT2020 Mother Board Int'f (MBIB)
28
MCT (Aseco Corporation)
DGBM
MCT2020 MCT Diag. Brd.
29
MCT (Aseco Corporation)
Deskew
MCT2020 Deskew Boards
30
MCT (Aseco Corporation)
MCT2020 Controller Box w/ coax Cable
31
Sun Microsystems Inc.
GDM 20D10
21 Inch Workstation Monitor
4
32
Kulicke & Soffa Industries Inc
KNS 1488L Turbo Plus
Gold Ball Bonder
6
6012
33
MULTITEST GMBH & CO. KG
MT9105 Spares
Handler Change Kits
Various
34
KLA Tencor
Surfscan 7700
Pattern Wafer Inspection System
7
0896-811M SFS7700M
35
DISCO CORPORATION
2H6TM
Disco Dicing Saw
8
DD9184
36
DISCO CORPORATION
2H6TM
Disco Dicing Saw
9
DD9172
37
TOKYO SEIMITSU CO., LTD
APM90A
Sutomatic Test Prober
4
F01024AN
38
Kulicke & Soffa Industries, Inc.
Spares for Model 8060/8020/8028
Various
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If interested in one or more items, please click here.
Six Inch (6") Used, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Furnaces, EPI Reactors, Vacuum Systems, MSGrp1
Diffusion
Item
Equipment
Qty
Make
Model
Serial #
Description
1
RTP
1
AG Associates
4100
IL8021 (1309)
Mfg 1968, robt load, control screen, 2 chillers
2
Diffusion Furnace
1
Bruce/BTU
4 stack, 3 atmos, 1 LPCVD, catiliver load, 7351C controllers, Argo cont Busch pump set, Evans exhaust burnbox
3
Diffusion Furnace
1
Bruce/BTU
(0356)
4 stack, 2 stacks operational, 1 alloy, 1 atmos, Schumacher control, Bruce gas control
4
Diffusion Furnace
1
Bruce/BTU
(1313)
4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, Schumacher source control, Bruce 7900 atmos control model 8115 V-CVD for tube #4; Ebara pump set
5
Diffusion Furnace
1
Bruce/BTU
(1315)
4 stack, cantiliver load, 7355x controllers, 3 oxidation, 1 LPCVD, 1 Nitride, 3 pump sets, V-CVD & 7900 control, Schumacher source controller
6
Diffusion Furnace
1
Bruce/BTU
(1314)
4 stack, 2 atmos, 2 LPCVD, 7355x control, 2 pump sets, V-CVD & 7900 controls, Schumacher source controller
7
Diffusion Furnace
1
Bruce/BTU
(0732)
4 stack, 2 stacks operational, 2 atmos, 2 POCL3, cantiliver load, 7351C control, Schumacher source control, w/ pump sets
8
Diffusion Furnace
1
Bruce/BTU
(0733)
4 stack, cantiliver load, 7351C control, Argon gas unit
9
Fume Scrubber
2
Delatech
858V2
801-925,801-894
Exhaust gas conditioner with pump
If interested in one or more items, please click here.
Etch
Item
Equipment
Qty
Make
Model
Serial #
Description
1
Wafer Dryer
2
Yield Up
Omega 1000
Alcohol based dryer, 2 stations w/ digital display
2
Etcher
2
AMAT
8310
325801 (1590) & 325802 (1310)
Single chamber, loadlock, oxide etch endpoint detector w/ pump set, heat exchanger, controller, chiller
3
Etcher
2
AMAT
8330A
(0904) & 383 (1311)
Metal etcher, single chamber, loadlock, endpoint, CTI 8200 compressor, heat exchanger, system controller, 2 UPS units, gas panel Ebara A30W pump set, gas trap, remote terminal
4
Etcher
1
LAM
4400
2031 (1330)
Poly silicon etch, end point detector, cassette-to-cassette, RF gen, chiller, remote terminal, PC tracking system, Busch CS500 pump stack and Edwards pump set
If interested in one or more items, please click here.
Lithography
Item
Equipment
Qty
Make
Model
Serial #
Description
1
Inspection Microscope
5
Nikon, Oly, MM
7106089 (0802)
10X eyepiece, & 5, 20, 50, 100X objectives, w/ light
2
Track System
5
SVG
90 Series
5510CAB-19 mfg 95, 5601CAB-02 mfg 96, 9703CAB-01 mfg 97, 9704CAB-01 mfg 97, 9706CAB-07 mfg 97
W/ video display, Asyst smif enclosure/loaders, spin coater, dual sided, 2 coat, 2 vapor prime, 2 chill plates, 3 hot plate modules, w/ robot transfer system
3
Track System
3
SVG
90 Series
5510CAB-20 mfg 95, 5601CAB-03 mfg 96, 9707CAB-01 mfg 97
3 dev, 6 hot plates, 2 chill plate modules, Assyst encl w/ load, dual sided, w/ robot transfer system. (S/N 9707CAB-01 unit in storage, brand new, unsed)
4
Stepper
3
ASM03, ASM04, & ASM05
PAS5000-50
9938 mfg 93, 7586 mfg 96, 6666 mfg 96
Send/receive, 5" reticle, flat, 5 micron, 15 x 15 mm field size, 48 NA laser alignment, w/ control panel (s/n 4232, 3636, 9992 have TEP options)
5
Stepper
1
ASM06
PAS5000-50
9992 mfg 96
P-chuck needs repair for this tool
6
CD System
1
Bio-Rad
Q5 Questor
Q2804
Auto CD & overlay system, 2 send, auto load, control system
7
CD SEM
1
Opal
7830i
PR-146
4 station load in-line, w/ Mitsubishi LP200 video copy processor
If interested in one or more items, please click here.
Metrology
Item
Equipment
Qty
Make
Model
Serial #
Description
1
Wafer Defect System
1
KLA
26088-RS
W2608308
Mfg 1997, send/received, w/ Olm micro., 5 assorted obj., w/ LCD display
2
CV System
1
MDC
541-414 (0353)
CSM/2 Semiconductor measure system, CSM PC control, Signatone hot chuck w/ probe station, Booton 72B capacitor meter
3
Film Thickness Measurer
1
Prometrix
FT530e
w/ PC control & video display
4
Film Thickness Measurer
1
Bio-Rad
QS-300
24400
Manual load, w/3420 PC control
5
Film Thickness Measurer
1
Bio-Rad
S-100
60690 (0824)
digilab, manual load
6
Stress Gauge
1
Ionic System
30058
0038
w/ PC controller
7
Ion Measurer
1
ThermaWave
TP200
TP02200-1105 (1266)
w/ video display and manual load
8
Ion Measurer
1
ThermaWave
TP300
0300-3361
Video terminal unit, manual robot load
9
Ion Analyzer
1
Semi-Diag
SPV CMS 4000
8942CMS4010
w/ chuck, heat lamp, PC controller
10
Inspection Microscope
2
B&L
Inspection type, w/ stand
11
Wafer Comparator
1
Micro-Vu
H-14
3175
14" optical comparator, tabletop
12
Mask Comparator
1
Leitz
177 (0690)
10x eyepiece, 3, 2, 16, 50x objectives, dual station, comparator projector w/ x, y control
13
SEM
1
Jeol
IC848A
EP13202275 (1327)
w/ camera attachment, Sony monitor
14
SEM
1
Hitachi
S800
w/ camera attachment, Sony monitor
15
Wet Sink
2
Assorted
3 ft unit w/ digital controls
16
Wet Sink
12
Assorted
4 ft unit w/ digital controls
17
Wet Sink
1
SEC
5 ft unit w/ digital controls
18
Wet Sink
3
Assorted
6 ft unit w/ digital controls
19
Wet Sink
4
Assorted
8 ft unit w/ digital controls
20
Wet Sink
1
SEC
10 ft unit w/ digital controls
21
Wet Sink
1
Bold Tech
1806
6 ft, 2 hot pots, quick dump rinse, enclosed w/ digital controls
22
Ultrasonic Cleaner
1
Semi. Tech
2 ft dual bin, w/ transfer arm
23
Spin Dryer
16
Semitool
270D
Double stack, 6" set-up, w/ digital display
If interested in one or more items, please click here.
Miscellaneous
Item
Equipment
Qty
Make
Model
Serial #
Description
1
Bake Oven
10
VWR
1610/1620
W2608308
table top models, 24" x 24"
2
Wafer Transfer
7
Fortrend
Automatic wafer transfer system
3
Vertical Tube Cleaner
1
Polyflow
4
APEX Furnace Controller
1
4
PROMIS Server
1
If interested in one or more items, please click here.
Six Inch (6") Wafer Fab or Semiconductor Equipment, MSGRP2
Thin Film/Implant
Item
Equipment
Manufacturer/Model
Qty
Note
1
H/C Ion Implanter
Eaton Nova/NV GSD-80
1
2
Positive Coater
AIO (3 track x 1, 2 track x 2)
3
Actually SVG 8600 or 8800 model
3
Positive Developer
AIO (3 track x 2, 2 track x 1)
3
Actually SVG 8600 or 8800 model
4
Negative Coater
AIO (2 track x 2)
2
Actually SVG 8600 or 8800 model
5
Negative Developer
AIO (3 track x 1, 2 track x 2))
3
Actually SVG 8600 or 8800 model
6
Nitrice/Oxide Etcher
LAM 590
1
Pumps not included
7
Plasma Asher
Gasonics Aura 1000
5
Pumps not included
8
Plasma Asher
BRANSON/IPC
2
Pumps not included
9
Stepper
NIKON G3A X 6, G4D X 2
8
10
Positive Batch Developer
ULTRA FAB
1
11
Rinser Dryer
SEMITOOL 870 Dual
13
12
M/C Ion Implanter
Eaton Nova/NV-6200AV
1
13
Horizontal Furnace
MRL, EXPOTECH
6
14
Vertical Furnace (Phos Dep)
SVG/VTR-7000
2
15
LP-SiN (Vertical)
SVG/VTR-7000
1
Pump not included
16
AL Wet Etch Sink
ULTRA FAB
1
 
17
BOE Sink
WPS 2, ULTRA FAB 1
3
18
Diffusion Pre-Clean Sink
WPS 3, ULTRA FAB 2
5
19
H2SO4 Strip Sink
WPS 2
2
20
HF Etch Sink
WPS 1, ULTRA FAB 1
2
21
As Coater Cup Clean Sink
1
22
Tube Clean Sink
ULTRA FAB
1
23
Parts Clean Sink
1
24
M/C Ion Implanter
Eaton Nova/NV-6200
1
25
EPI Reactor
AMAT/AMC-7600
6
Begins NP list, grp2
26
Horizontal Furnace
MRL 1, BTU 1
2
27
Back Metal Vacuum Evaporation System
CHA
1
28
Rinser Dryer
SEMITOOL
5
29
Box Cleaner
Atcor CRD-2410
2
30
Surfscan
KLA Tencor/Surfscan 4000
1
31
Pointprobe
Magne-Tron M700
1
32
Nano Spec
Nanometrics
1
33
Microscope
NIKON
3
34
Diffusion Pre-Clean Sink
ULTRA FAB
1
35
Mega-Sonic Sink
FSI
2
36
Back Side Etch Sink
WPS
1
37
H2O2 Sink
ULTRA FAB
1
38
HF Sink
WPS
1
39
Parts Clean Sink
Amro Plastic Products
1
40
Bottle Clean Sink
1
41
Automatic Wafer Probing Machine (PCM)
Tokyo Seimitsu A-PM-6000A
1
Begins 760K list, grp2
42
Manual Prober
Rucker & Kolls Model #660J
1
43
Manual Prober
Rucker & Kolls Model #668
1
44
Curve Tracer
Tektronix Type 576
1
45
Microscope
Olympus BH2
1
46
Oscilloscope
Tektronix 60MHz 2215A
1
47
Bake Oven
Despatch
1
If interested in one or more items, please click here.
Semiconductor Equipment and Major Components
Equipment available for sale
Fusion 200PCU POLO UV cure tool (1997, like new)
Fusion 200PC UV cure tool, excellent condition
Leybold MAG400 turbo pump, NEW
ENI generators, calibrated: OEM 12A, OEM650AXL, OEMTR0A, etc.
AE RFG Model PDW2200
M&W single and dual channel chillers, rebuilt
Ebara dry pump, model 65X40, NEW, $13,900.00
Drytek mega strip 6, excellent condition
Flouroware box washer, model 8010, excellent condition
Rucker and Kolls semi auto prober, model 680A
Fortrend wafer transfer tool, 6 inch, stainless steel, qty 5
If interested in any or all of the above, please call for details, or please click here.
Subject to availability at time and date of inquiry.
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
Bearing vibration
Rolling element bearing condition (BEARCON)
Shaft vibration (X/Y)
Temperature
Process parameter
Balancing
One (1) plane
Two (2) planes
If interested, please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
3M Satin Finishing Material
Stainless steel material for 3/32" shank and related parts
Specifications:
7/8 X 3/8 X 3/32
7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
If interested in one or more items, please click here.
Please contact us at:
OLM Enterprises
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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OLM Enterprises Semiconductor Equipment Resource Center
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