| Item
| Ref #
| Description
| AMOS DESC
| Vendor
| SN
| Disciplin
| Promis ID
|
| 126
| |
Alpha Step
| N/A
| N/A
| N/A
| Diffusion
| DASTEP01
|
| 127
| |
Film Thickness Measurement System
| Nano Thickness Measuring System
| Nanometric
| 0780-0712
| Diffusion
| DNANO04, DNANO01
|
| 128
| |
Irvine Optical 3BW Microscope
| Irvine Optical 3BW Microscope
| Unisys
| 0
| Diffusion
| ESCOPE32
|
| 129
| |
Mac Jr.
| N/A
| N/A
| N/A
| Diffusion
| DXFER22
|
| 130
| |
Rapitran
| Rapitran II Wafer Transfer System
| Faity Enterprise
| 0
| Diffusion
| DXFER32
|
| 131
| |
Alpha Step
| N/A
| N/A
| N/A
| Etch
| EALPHA02
|
| 132
| |
Inspectron-100 Wfr Transfer RO
| N/A
| N/A
| N/A
| Etch
| N/A
|
| 133
| |
Scope
| Microscope (LEITZ)
| Walker
| 40742
| Etch
| ESCOP28
|
| 134
| |
Scope
| Inspectron-100 Wfr Transfer Robot
| Technical Instrm
| 9230-301
| Etch
| ESCOP10
|
| 135
| |
Tegal 915, Tegal Etcher #27
| AGG10-ENI Solid State 1000 Watt Gen
| Raines Technology
| 972
| Etch
| ET915E11
|
| 136
| |
Blue M Oven
| N/A
| N/A
| N/A
| Implant
| N/A
|
| 137
| |
MKS Spinning Rotor Gauge
| SRG-2 Spinning Rotor Gauge
| MKS Instruments
| 202739
| Implant
| N/A
|
| 138
| |
Nikon Microscope
| Rykosha Line Width Measurement
| Coberly
| 0
| Photo
| PULTRA03
|
| 139
| |
Nikon Microscope
| Ultraspec III Inspection Station
| Irvine Optical
| 0
| Photo
| ESCOP29
|
| 140
| |
Scope
| N/A
| N/A
| N/A
| Photo
| N/A
|
| 141
| 1446
| Thermco, Minibrute, Furnace (430 Couples Cure) Tube 3,
| N/A
| N/A
| AG-555
| Films
| FFCE6C
|
| 142
| 1446
| Thermco, Minibrute, Furnace (430 Couples Cure) Tube 3,
| N/A
| N/A
| N/A
| Films
| FFCE6E
|
| 143
| 1446
| Thermco, Minibrute, Furnace (430 Couples Cure) Tube 4,
| Thermco Minibrute MB-80
| Thermco
| AG-556
| Films
| FFCE6D
|
| 144
| 1451
| Coater Wafer Track
| Wafertrac Bake/ Coat/ Bake R-L
| GCA
| 541-0068
| Films
| FGCA9K01, FGCA9K02, FGCA9K03
|
| 145
| 1453
| Blue M Oven
| N/A
| N/A
| N/A
| Etch
| FOVEN02
|
| 146
| 1454
| IVS
| IVS-120
| Interactive Videos Inc
| 120980204 - IVS01
| Films
| PIVS01
|
| 147
| 1457
| Leitz MIS200
| N/A
| N/A
| 309
| Films
| N/A
|
| 148
| 1464
| Tencor 7200
| Tencor Surfscan 7200
| Tencor Instruments
| 0392-214
| Films
| ZTENCOR1
|
| 149
| 1466
| Tencor
| Surfscan 4000 Monitor
| Tencor
| 886196
| Films
| ZTSURF2
|
| 150
| 1470
| Tencor 7200
| Surfscan 4000
| Tencor Instruments
| 0392-214
| Films
| ZTENCOR1
|
| 151
| 1470
| Tencor 4500/5500
| Surfscan 5500 Surface Contamination
| Tencor Instruments
| 592253
| Films
| ZTSURF4
|
| 152
| 1475
| Tencor
| Surfscan 4500 Wafer Analyzer
| Tencor Instruments
| 687156
| Films
| ZTSURF1
|
| 153
| 1478
| Tegal 915, Dry Resist Strip (Tegal 915 #6) Etcher
| Tegal 915 Plasma Barrel ERW System
| Tegal
| 10872
| Films
| FT915E01
|
| 154
| 1484
| Nano Scope
| Nano-Spec Film Thickness Monitor
| Nanometric
| 7800735
| Films
| FNANO03
|
| 155
| 1528
| MRC, NA, Metal Deposition (MRC #1)
| 603 Basic Sputter System
| MRC
| 16732
| Films
| FMRC210
|
| 156
| 1530
| Prometrix
| Versa Probe VP10
| Prometrix
| 609V1
| Films
| FVPTEN01
|
| 157
| 1534
| MRC 603, MRC 212, Metal Deposition
| Model 603 Basic Sputtering System
| MRC
| 14555
| Films
| FMRC212
|
| 158
| 1537
| LEITZ Laborlux II Microscope
| LEITZ Laborlux II Microscope
| Walker
| 0
| Films
| FSCOPES
|
| 159
| 1538
| MRC 214 RF Generator
| N/A
| N/A
| N/A
| Films
| N/A
|
| 160
| 1538
| MRC 603, MRC 214, Metal Deposition
| Model 603 Basic Sputtering System
| MRC
| 14653
| Films
| FMRC214
|
| 161
| 1538
| MRC 216, Metal Deposition TiW/ AL
| Used MRC 603-1 SPU
| Telemark
| 14760
| Films
| FMRC216
|
| 162
| 1549
| Reflectometer
| N/A
| N/A
| N/A
| Films
| FRFLCT04
|
| 163
| 1550
| Scope
| N/A
| N/A
| 61896
| Films
| FSCOPE06
|
| 164
| 1553
| Varian 3190, #5, Metal Deposition
| Equip Refurb Varian 3190
| Calogic Corp
| B16E
| Films
| FVAR01
|
| 165
| 1554
| Varian
| Varian3190 Coating System
| Varian
| 85406-351
| Films
| FVAR04
|
| 166
| 1555
| Prometrix
| N/A
| N/A
| 808V1
| Films
| FVPTEN03
|
| 167
| 1560
| Reflectometer
| Reflectometer Model #1
| A.M.I.
| 208
| Films
| FRFLCT01
|
| 168
| 1562
| Varian 233
| Varian 3190 Sputtering System
| Off Shore Return
| 84269-230
| Films
| FVAR02
|
| 169
| 1567
| Varian 231 Cryo (Part of Varian Asset #393711)
| N/A
| N/A
| N/A
| Films
| N/A
|
| 170
| 1567
| Varian 3190, Varian 231, Metal Deposition
| Varian 3190 Sputtering System
| Semicon Spec Inc
| 85461-378
| Films
| FVAR03
|
| 171
| 1568
| Varian
| Varian 3190 Coating System
| Varian
| 85407-366
| Films
| FVAR05
|
| 172
| 1571
| Nanometrics Video Printer
| N/A
| N/A
| N/A
| Films
| FNANO04
|
| 173
| 1571
| Nanometrics
| Nano Spec Film Analyzer
| Nanometric
| 0384-2277
| Films
| FNANO04
|
| 174
| 1576
| Thermco, Minibrute, Furnace Tube #1 & 2/3 Platinum, FNL Sinter
| Thermco Mini-Brute 4' 3-Stack
| Bill Mullen
| AG397398399
| Films
| FFCE1A, FFCE1B, FFCE1C
|
| 175
| 1578
| Auto Transfer MGI System
| N/A
| N/A
| 1087202
| Films
| FTANS07
|
| 176
| 1579
| Auto Transfer
| N/A
| N/A
| 1087201
| Films
| FTANS08
|
| 177
| 1589
| Stress Gauge
| HP73-Ionic Stress Gauge
| Ionic Systems
| 86992201
| Films
| FSTRESS2
|
| 178
| 1590
| Rudolph
| Ellipsometer, Model Auto-EL II
| Rudolph Research
| 7458
| Films
| FELLPS01
|
| 179
| 1591
| Acid Hood Freckle Etch 16:1:1:2
| Polypro 6' Wet Station
| Sun Valley Plastics
| None
| Films
| FMCLN01, FMCLN02
|
| 180
| 1592
| ST860
| ST860 - Semitool Double Stack
| Semitool
| 8317
| Films
| FSDR06, FSRD07
|
| 181
| 1597
| SRD
| N/A
| N/A
| 9867
| Films
| FSRD05
|
| 182
| 1598
| Acid Hood HF
| 2 ½ Ft Long Manual Wet Station
| E-3 System
| None
| Films
| F61HF
|
| 183
| 1600
| SRD
| Verteq Double Stack Rinser/ Dryer
| Versatile Technology
| 8224
| Films
| FSRD03, FSRD04
|
| 184
| 1601
| Aqua Regia
| Semi-Auto Wet Station w/ Circulator
| E-3 Systems
| None
| Films
| F1514C
|
| 185
| 1604
| ST-260 Spin Dryer
| ST-260 Spin Dryer
| E-3 Systems
| None
| Films
| F1514C
|
| 186
| 1605
| Aqua Regia
| Semi Auto Wet Station w/ Quartz Tanks
| E-3 Systems
| None
| Films
| FAQREG01, FAQREG02
|
| 187
| 1607
| Scope
| Leitz Laborlux II Microscope
| Walker
| 553401
| Films
| FSCOPE1
|
| 188
| 1608
| Scope
| inspection Station Microscope
| Research
| 625
| Films
| FIRSCOPE1
|
| 189
| 1609
| Bake Oven
| 4 Trk Wafertrac Bake System
| GCA Corp
| 1333
| Etch
| EBAKE12, EBAKE13, EBAKE14
|
| 190
| 1611
| Tegal 903
| Equip Refurb Tegal 903E
| Calogic Corp
| 10289
| Etch
| ET903E15
|
| 191
| 1612
| Tegal 903E Etcher
| Used Tegal 903E w/ ENI ACG-10T RF
| California Micro Devices
| 10273
| Etch
| ET903E14
|
| 192
| 1612
| Eureka
| Eureka II Wafer Transfer System
| Mactronix
| 0
| Films
| FTRANS09
|
| 193
| 1620
| VSM Furnace
| 2 Stack Horizontal Furnace
| USM
| 8-1741
| Films
| FFCE8A, FFCE8B
|
| 194
| 1625
| Scope
| N/A
| N/A
| N/A
| Etch
| ESCOP18
|
| 195
| 1626
| Nano 8000
| Nanospect 8000 Autofilm Thickness System
| Nanometrics, Inc.
| 8.00068E+11
| Etch
| ENANO08
|
| 196
| 1629
| Nano
| N/A
| N/A
| N/A
| Etch
| ENANO07
|
| 197
| 1631
| Tegal 903E #13 Etcher
| Tegal 903E, 4 Inch Etch System
| Advanced Micro
| 10422
| Etch
| ET903-16
|
| 198
| 1635
| Tegal 903E Etcher
| Tegal 903E, plasma In-Line Etcher
| Paper Tag
| 10471
| Etch
| ET903E11
|
| 199
| 1637
| Tegal 903E Etcher
| Tegal 903E, Plasma In-Line Etcher
| Tegal
| 10490
| Etch
| ET903E12
|
| 200
| 1675
| Delatech AB13
| 857V-M Vertically Mounted CDO System
| Delatech, Inc.
| 800845
| Films
| N/A
|
| 201
| 1675
| Novellus
| Concept One CVD System, 4" Setup
| Novellus Systems
| 93-52-734
| Films
| FNVCVD04
|
| 202
| 1677
| Delatech AB15
| CDO TM System w/ Hydrogen Injection System
| Delatech, Inc.
| 801-037
| Films
| N/A
|
| 203
| 1675
| Novellus #3 Concept One Reactor
| Concept One-150 Novellus System
| Novellus Systems
| 91-41-852
| Films
| FNVCVD03
|
| 204
| 1679
| Flexus F5000
| F5000 Flexus Stress Measurement System
| Flexus Stress
| 40-41
| Films
| FSTRESS01
|
| 205
| 1680
| Exhaust Gas Processor Turbo MO
| Exhaust Gas Processor Turbo Model 5
| Ecolotec King
| N/A
| Films
| N/A
|
| 206
| 1680
| guardian-4 Gas Protection System
| Guardian-4 Gas Protection System
| M.G. Industries
| 823
| Films
| N/A
|
| 207
| 1680
| Novellus #2, Concept One Reactor
| Novellus Concept I - System #307
| Novellus Systems
| 93-09-307
| Films
| FNVCVD02
|
| 208
| 1684
| Guardian Scrubber
| Guardian 8 Gas Protection System/ Hydrogen
| M.G. Industries
| 438
| Films
| N/A
|
| 209
| 1680
| Novellus #1, Concept One Reactor
| Novellus Concept I - 150 CVD System
| Novellus Systems
| 95-02-891
| Films
| FNVCVD01
|
| 210
| 1687
| Films Analyzer
| Tylan Thin Film Analyzer w/ Print
| Tylan
| 103
| Films
| FAXIC01
|
| 211
| 1690
| Eclipse
| MRC Eclipse Metal Sputterer
| From EKB
| 0
| Films
| FECLPS01
|
| 212
| 1705
| NH3 Gas Cabinet
| NH3 Gas Cabinet
| Norcimbus, Inc.
| 0
| Films
| N/A
|
| 213
| 1709
| Deltasonic
| N/A
| N/A
| N/A
| Etch
| N/A
|
| 214
| 1722
| YES, LPIII, Vapor Prime Oven, Oven/Bake
| Model LP-5 Vacuum Bake/Vapor Prime
| Y.E.S., Inc.
| 0
| Photo
| PHMDS07
|
| 215
| 1727
| Scope
| Irvine Optical, 3BW Microscope
| Unisys
| 0
| Photo
| PSCOPE29
|
| 216
| 1731
| Nikon Scope
| IIIB - Ultra Station (Inspection Station)
| Jack Kriegel
| 0
| Photo
| PSCOPE08
|
| 217
| 1734
| Nikon Scope
| IIIB - Ultra Station (Inspection Station)
| Jack Kriegel
| 0
| Photo
| PSCOPE07
|
| 218
| 1737
| Scope
| IIIB - Ultra Station (Inspection Station)
| Jack Kriegel
| 0
| Photo
| PSCOPE09
|
| 219
| 1742
| Leitz Scope
| N/A
| N/A
| N/A
| Photo
| PCOMP02
|
| 220
| 1748
| Scope
| Microvision 15-Auto/Waf Inspection Station
| Optical Spec.
| 0
| Photo
| ESCOP24
|
| 221
| 1768
| Nikon Microscope w/ 6X6 Flat P
| N/A
| N/A
| 61921
| Films
| FSCOPE03
|
| 222
| 1773
| CV Plotter
| CSM/16 MDC Computerized C-V Plotter
| MDC
| 160
| Films
| FCVPLT02
|
| 223
| 1777
| Eaton, NV 10-90, Implanter
| Nova 10-80 Implanter #80
| TN&R Scientific
| 0
| Implant
| IHC02
|
| 224
| 1781
| Eaton, NV 10-160, Implanter #6
| Nova 10-160 Implanter
| Eaton Corp
| 460117
| Implant
| IHC01
|
| 225
| 1784
| Implant Source Clean Hood
| SS Maint Hood w/ Elect Safety Pkg
| E-3 Systems
| 0
| Implant
| N/A
|
| 226
| 1790
| Gasonics, Hipox, Tube J-1, Furnace
| Hipox
| Gasonics
| 05501
| Implant
| DFCEHP01, DFCEHP02
|
| 227
| 1795
| SRD
| N/A
| N/A
| N/A
| Photo
| PSRD19, PSRD20
|
| 228
| 1796
| Sun Valley Plastics, Photo Resist Developer Hood
| 4' Pos. Dev. Hood - For Develop Process
| Sun Valley Plastics
| None
| Photo
| PDHOOD01, PDHOOD07
|
| 229
| 1797
| ST870 Double Stack Rinser/ Dryer
| ST870 Double Stack Rinser/ Dryer
| Semitool
| 6230
| Photo
| PSRD11, PSRD12
|
| 230
| 1802
| GCA 1006, Resist Coat Track #3
| Amp/ Coat/ Bake System, Model 1000-6
| GCA
| 2585
| Photo
| PGCAC28, PGCAC29, PGCAC30
|
| 231
| 1804
| SVG 8126 PC-RD EBR System Upgrade to South GCA
| SVG 8126 PC-RD EBR System
| Silicon Valley
| 0
| Photo
| N/A
|
| 232
| 1804
| SVG 8126 PC-RD EBR System Upgrade to South GCA
| SVG 8126 PC-RD EBR System
| Silicon Valley
| 0
| Photo
| N/A
|
| 233
| 1804
| SVG 8126 PC-RD EBR System Upgrade to South GCA
| N/A
| N/A
| N/A
| Photo
| N/A
|
| 234
| 1804
| SVG 8100, SVG Resist Coat Track #1
| 3-Track Coater/ Hot Plate System
| SVG Inc
| 0
| Photo
| PSVGC03, PSVGC04, PSVGC05
|
| 235
| 1804
| SVG 8100, SVG Resist Coat Track #1
| SVG 8126 PC-RD EBR System
| Silicon Valley
| 0
| Photo
| PSVGC03, PSVGC04, PSVGC05
|
| 236
| 1804
| SVG 8100, SVG Resist Coat Track #1
| N/A
| N/A
| N/A
| Photo
| PSVGC03, PSVGC04, PSVGC05
|
| 237
| 1804
| SVG 8100, SVG Resist Coat Track #1
| N/A
| N/A
| N/A
| Photo
| PSVGC03, PSVGC04, PSVGC05
|
| 238
| 1806
| SVG 8632, Resist Development Track #1
| Regen SVG8632 CTD System/ 8622 CTD M
| Site Services
| 0
| Photo
| PSVGD03, PSVGD04, PSVGD05
|
| 239
| 1811
| Nano
| 010-0174 Nano-Spec AFT Film
| Nanometrics
| 099-0381
| Photo
| PNANO01
|
| 240
| 1813
| Perkin Elmer
| Used P & E 542 Alignment Tool/ 100MM
| Techlink Enterprises
| G4031
| Photo
| P50018
|
| 241
| 1816
| Perkin Elmer
| Used P & E 542 Alignment Tool/ 100MM
| Techlink Enterprises
| G4611
| Photo
| P50017
|
| 242
| 1819
| Perkin Elmer
| Perkin Elmer 640 Align/ Expose Tool
| BF Enterprises
| 0
| Photo
| P50016
|
| 243
| 1822
| Perkin Elmer
| PE542 Scanner with ASM, Air Gage, DFA
| KS Equipment, Inc.
| A5551
| Photo
| P50015
|
| 244
| 1825
| Perkin Elmer
| PE Model 652HT
| Techlink
| J50925
| Photo
| P50014
|
| 245
| 1832
| Mass Transfer
| N/A
| N/A
| N/A
| Photo
| DXFER31
|
| 246
| 1835
| Perkin Elmer
| OMS-I Overlay Measurement System
| Perkin Elmer
| N/A
| Photo
| P50010
|
| 247
| 1840
| Perkin Elmer
| Model 552 Micralign System
| Perkin Elmer
| E4191
| Photo
| P50012
|
| 248
| 1843
| Perkin Elmer
| Micralign Model 542HT
| Perkin Elmer
| J4041
| Photo
| P50013
|
| 249
| 1846
| Perkin Elmer 640 #1
| Model 640 Mask Aligner System
| SVG Lithography
| A4561R
| Photo
| P50030
|
| 250
| 1850
| AL6 Aligner (Double Side)
| AL6-2 Mask Aligner
| Quintel Corp
| N/A
| Photo
| PAL601
|
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
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