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Wafer Fabs Available for Sale!!!

Note: All systems and fabs are subject to availability at time and date of inquiry.

Contents

• Used Kokusai Vertical Furnace System, 8 Inch
• Used Vertical Furnace, TEL LPCVD System, 6 and 8 Inch
• Hewlett Packard Tester IV HP-4071
• Eaton Nova Ion Implanter, NV10-160, 4 Inch
• Eaton/Axcelis GSD-200, Eight Inch, High Current Ion Implant System
• Eaton NV8250P, 6 Inch, Medium Current Ion Implanter
• Varian Ion Implanter, 8 Inch, High Energy Ion Implantation System, Model G1510
• Automatic Resistivity Meter
• Diamond Blades by Disco Abrasive Company for Sale
• 4 Inch Semiconductor Equipment for Sale

Submit reasonable offers for immediate consideration.

Please click on the stamp images below to see photos:

                        

If interested,     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Please click on the stamp images below to see photos:

     

If interested,     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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If interested     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Please click on the stamp images below to see photos:

            

If interested,     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Configuration

• Configured for 200 mm wafers
• Manufactured Date:  May, 1996
• CE Marked System
• Interface:
  • Sun Spac V computer
  • MTI floppy and backup drive
  • Sun service monitor
  • Software version 4.4.2.1
  • SECS I/O interface
• Programmable tilt angle:    -10 to +10
• Dose range:    1.0 E11 to 1.0 E17 ions/cm squared
• Energy range:    10 to 180 keV
• ASYST wafer handler
• 4 cassette stages
• Extra sources:    Enhanced without vaporizer
• Macrobot, s/n 95497
• Oil-filled transformer

• Auxiliary equipment:
  • Chiller:    Neslab, s/n C95128144
  • Pumps:
    • Ebara 40x20 tur backup, s/n 956274
    • Ebara 40x20 end station pump, s/n 156270
    • Seiko H2000C turbo, s/n 0274R
    • CTI CT8 beamline, s/n 32C8916481
    • CTI CT10 end station, s/n 1389406376
  • Cryo compressors:
    • CTI 8300, s/n 85C0006349
    • CTI 8500, s/n 68B9608751

If interested,   please click here.

Note: Subject to availability at time and date of inquiry.

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Vital Information and Configuration:

• Purchased   10/25/1998
• Configured for 6 inch wafers
• Sun Sparc 5 Operating System
• Software version 3.5.2i
• 8 mm tape backup
• Extended life source (VLS)
• Remote monitor
• Miscellaneous parts of $100,000 spare parts kit remaining
  • 2 extra sources, approx $40,000 each
• Seiko-Seiki turbos:
  • 2 with STP 100C controller
  • 1 STP 300C
• Up to 750 keV with triple charge
• 4x SDS gas box (subatmospheric delivery system)
• Edwards DP40 W/ 350 blower for end station/load lock
• 3 CTA on-board cryos
• 2 Edwards DP40's for chamber
• Neslab chiller
• ESC chuck
• Power conditioning/isolation transformer

• Front End:
  • 3 load cassettes
  • Flat finder
  • Buffer cassette
  • Macrobot robot (standard)
  • Programmable flat orient (27.5 deg default)
  • Wafer rotation
  • Programmable auto tilt, 0 to 89 degrees

Note: All Products: Subject to availability at time and date of inquiry.

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Configuration

• Year of Installation:   1996
• 200MM Batch
• 9 Site Disk
• 180 Wafers per Hour
• 40 Kev to 3 Mev Energy Range
• EBARA 40X20 Backing Pumps
• Seiko-Seiki STP-H2000C and Varian XXX Turbo Pumps
• CTI Cryo pumps
• Up to 35 Degree Implant Angle
• Touch Screen User Interface
• (1) Triple Charge Implant
• 1 Million Volts

Note: All Products: Subject to availability at time and date of inquiry.

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Please click on the stamp images below to see photos:

If interested,     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Type of blades:

• NBC - ZB - 204J     50.2 X 0.020 X 40 mm     79 pcs
• NBC - Z - 1060     50.4 X 0.025 X 40 mm     429 pcs
• NBC - Z - 1060     50.6 X 0.030 X 40 mm     399 pcs
• NBC - Z - 1060     50.2 X 0.020 X 40 mm     379 pcs

Please click on the stamp image below to see photo:     

If interested in one or more items,     please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Equipment List

Front End
1.   4 Inch Coaters/Developers
• EATON 6000XL
• Vintage:   1991
• 5 Units, Good Working Condition
• 3-Track System
  • Track 1:   Indexer, coating spinner - hot plate - hot (cool) plate-indexer
  • Track 2:   Indexer, hot plate-hot(cool) plate-indexer
  • Track 3:   Indexer, developing spinner - hot plate - hot(cool) plate-indexer
2.   4 Inch Developer System
• MILTIFAB
• Vintage:   1992
• With arm robots and hot platees
• 2 Units
• Very Good Working Condition
3.   4 Inch Wafer Steppers
• GCA, Mann 6100
• G-line, 5:1 reduction, Maximus 1000
• Equiped with climatic chambers
• 2 Units
• Very Good Condition
4.   4 Inch Wafer Steppers
• GCA, Mann 6300
• G-line, 5:1 reduction, Maximus 1000
• Equiped with climatic chambers
• 7 Units
• Very Good Condition
5.   4 Inch Magnetron Sputtering System
• Varian 3190
• Vintage:   1990
• Refurbished in year 2000 in USA
6.   Magnetron Sputtering System
• Leybold-Heraeus Z-650
• Vintage:   1992
• Very Good Condition
7.   Magnetron Sputtering System
• BALZERS, BAK 450
• Vintage:   1988
• Very Good Working Condition
8.   Ion Implanters
• ULVAC IM-2000MH (License DF-4-Varian)
• Vintage:   1988
• Very Good Working Condition
• 2 Units + 2 Units for Spares
9.   Plasma Etchers, 6 Units
• ALCATEL, GIR 220
• Vintage:   1988
• 2 Units for Si3N4/Poly-Si, 2 Units for Oxide, and 2 Units for Metal
• Good Condition
10.   Plasma Etchers
• Applied Materials 8120
• Applied Materials 8130
• Vintage:   Both 1989
• Both are in working condition
11.   4 Inch CVD Reactors
• ASM-mPCVD 210
• RH, 4 Tubes (Si3N4, Poly-Si, LTO, PSG)
• Vintage:   1989
• Very Good Condition
12.   Diffusion Furnaces
• ASM 210
• RH, 4 Tubes
• Soft Contact Loading
• MFC Gas Flow System
• Vintage:   1989
• 4 Units Available
13.   Laser Marking System
• LASERMARK LUMONICS 345
• Vintage:   1990
• Good Condition

Back End
1.   Molding Presses
• ASM-FICO-100
• Vintage:   1990
• 2 Units, Very Good Condition
2.   Trim and Form Presses
• ASM-FICO-TFX-2A
• Vintage:   1990
• 2 Units, Very Good Condition
3.   Dicing Saw
• DISCO DFD 3D08
• Vintage:   1988
• 1 Unit + 1 Unit for Spares
4.   Wire Bonder
• ASM AB 308A
• Vintage:   1990
• Good Condition
• 1 Unit
5.   Wire Bonder
• K&S 1470-3
• Refurbished in 2001 by LUNA TECH (USA)
• Very Good Condition
6.   Automatic Wire Bonder
• KAIJO DENKI 1435A, w/ automatic transport for 16, 24, 28, and 40 pin lead-frames
• Vintage:   1988
• 2 Units, Very Good Condition
7.   Automatic Wire Bonder
• SHINKAWA SWB FA UTC-5, w/ automatic transport for 16, 28, and 40 pin lead-frames
• Vintage:   1988
• 2 Units, Very Good Condition

If interested in one or more items,   please click here.

Note: All Products: Subject to availability at time and date of inquiry.

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Semiconductor Equipment Resource Center

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