Semiconductor or Wafer Fab Equipment, New Parts for Novellus Systems, Etc.
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!! Please click here.
5 Inch Wafer Fab Equipment Available!!! Please click here for list.
6 Inch Wafer Fab Line Available!!! Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
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Wafer Fab or Semiconductor Processing Equipment List - C2A
Lot #
Equipment
Model
Serial #
Asset #
2
Olympus Microscope
Beta
2270
80341
3
Olympus Microscope
VHMJL
80377
6
Nanometrics Nanoline
IV
0883-2007
N/A
7
Nikon Stepper
NSR 1505 G4D
59142
80015
8
Nikon Stepper
NSR 1505 G4D
N/A
80016
9
Ultratech Stepper
UT 1000
304
80014
10
Ultratech Stepper
UT 1000
98
80011
11
Ultratech Stepper
UT 900
68
80007
12
Ultratech Stepper
UT 900
130
80008
13
Ultratech Stepper
UT 900
167
80009
14
Ultratech Stepper
UT 900
197
80010
15
Nikon Lampass-M3
Lampass-M3
34327
80025
16
Olympus Microscope
VH2-UMA
2743
80376
17
Semitool SRD
470 Single
N/A
N/A
18
Semitool SRD
870 Dual
N/A
N/A
19
Tegal Etcher
803
8030283
80042
20
Lam Etcher
690
1412
80036
21
Lam Etcher
690
1373
80035
22
Lam Etcher
690
N/A
80037
23
Tegal Etcher
804
8040223
80039
24
Tegal Etcher
801
N/A
80038
25
Tegal Etcher
803
N/A
80041
26
Tegal Etcher
803
N/A
80040
27
Tegal Etcher
803
N/A
80040
28
LAM Etcher
490
1334
80028
29
LAM Etcher
490
60620
80029
30
LAM Etcher
490
N/A
80030
31
LAM Etcher
590
N/A
80033
32
LAM Etcher
590
N/A
80032
33
LAM Etcher
590
N/A
80029
34
Nikon Microscope
Optipot
243541
880145
35
Wet Sink
N/A
N/A
80161
36
Semitool SRD
870 Dual
N/A
80069
37
Wet Sink
Pad Wet
N/A
80062
38
Wet Sink
BOE w/ HF
N/A
80060
39
Semitool SRD
870 Dual
N/A
N/A
40
Semitool SRD
870 Dual
N/A
80065
41
Semitool SRD
470 Single
N/A
N/A
42
Wet Sink
Resist Strip
N/A
80059
43
Olympus Microscope
Beta - VH2-UMA
2680
N/A
44
Applied Materials
P-5000 Mk2
N/A
80023
45
Gasonics
AE-2001
N/A
80022
46
Nikon Microscope
Optipot 66
216686
N/A
47
Olympus Microscope
VHMJL
204776
N/A
48
Opal SEM
7830
N/A
80074
49
Olympus Microscope
VHMJL
N/A
80379
52
Olympus Microscope Training
VHMJL
204497
80378
53
Semitool SRD
870 Dual
N/A
80006
54
Sysmax Vac Etcher
Aluminum
N/A
80021
55
Wet Sink
Etcher
N/A
80063
56
Blue M Oven
CR07-256B/C
B40-670
80056
59
Fusion
M-150PC
179
80051
60
Fusion
M-150PC
250
80052
61
Fusion
M-150PC
335
80053
62
IPC Branson 12" 3 Gas
S2100-220
N/A
80045
63
IPC Branson 12" 3 Gas
S2100-220
N/A
80049
65
Olympus Microscope
VHMJL
204744
N/A
66
INSPEX
TPC 850
N/A
N/A
67
Biorad
QS-300
N/A
80178
68
BTU Bruce w/ 7355 Controller
BDF 41
N/A
80078
69
MGI
Challenger 1
N/A
80112
70
Semitool SRD
870 Dual
N/A
N/A
71
Wet Sink
HF Sulfuric
N/A
N/A
72
Wet Sink
BOE w/ HF
N/A
80089
73
Semitool SRD
870 Dual w/ res mtr
N/A
N/A
74
MGI
RapidTran II
N/A
N/A
75
BTU Bruce w/ 7355 Controller
BDF 41
N/A
N/A
If interested in one or more items, please click here.
Novellus Parts List
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Semiconductor or Wafer Fab Equipment for Five Inch Wafers
Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.
Note 2: All equipment are store in clean/humidity-temperature controlled room.
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
S01
G-Line Stepper
Nikon
NSR1505G3A
8803
2
S02
G-Line Stepper
Nikon
NSR1505G3A
8808
3
S03
G-Line Stepper
Nikon
NSR1505G4BK
9303
4
S04
G-Line Stepper
Nikon
NSR1505G4D
8802
5
S05
G-Line Stepper
Nikon
NSR1505G4D
9509
6
S06
G-Line Stepper
Nikon
NSR1505G6E
5,6
9809
7
S07
G-Line Stepper
Nikon
NSR1505G6E
5,6
9109
8
S08
G-Line Stepper
Nikon
NSR1505G7E
9009
9
S09
I-B38Line Stepper
Nikon
NSR1505i7A
5,6
0103
10
S10
Resist Coater and Developer
DNS
SKW-636BVP
5,6
9903
11
S11
Deep UV Curing System
Ushio Electric
UMA-802-H6
8802
12
S12
Deep UV Curing System
Ushio Electric
UMA-802-HC57MS
5,6
9201
13
S13
Character Exposure System
Canon
AIM-630
5,6
8708
14
S14
Lamp Annealing System
DNS
LAW-6L3-A
8801
15
S15
Lamp Annealing System
DNS
LAW-815
5,3
9503
16
S16
Dry Etcher
Tokya Ohka
OAPM-301B
8603
17
S17
Dry Etcher
Tokya Ohka
TCE-2600
9104
18
S18
Dry Etcher
Tokya Ohka
OPM-A1250
8802
19
S19
Dry Etcher
Tokya Ohka
OPM-A1200
8409
20
S20
Dry Etcher
Tokya Ohka
OAPM-A1200
8703
21
S21
Dry Etcher
Alcantec
MAS-801
5,6
9610
22
S22
Dry Etcher
Alcantec
MAS801-HR
0102
23
S23
Dry Etcher (Polysilicon)
Hitachi
M216A-2
5,6
9703
24
S24
Dry Etcher (Polysilicon)
Tokyo Ohka
OAPM-406
9409
25
S25
Dry Etcher (Polysilicon)
Hitachi
M216A-2
9703
26
S26
Dry Etcher (Oxide)
TEL
TE-5000
5,6
9703
27
S27
Dry Etcher (Oxide)
TEL
TE-4000
9703
28
S28
Dry Etcher (Oxide)
TEL
TE-8400S
9703
29
S29
Dry Etcher (Oxide)
TEL
TE-8400PE
9701
30
S30
Dry Etcher (Oxide)
Tokyo Ohka
OAPM-301B
8509
31
S31
Dry Etcher (Oxide)
Anelva
ILD-4003
8509
32
S32
Dry Etcher (Oxide)
Anelva
ILD-4013T
9503
33
S33
Dry Etcher (Metal)
Hitachi
M308AT
9011
34
S34
Plasma Etcher
Tokyo Ohka
OPM-A1200
8503
35
S35
Wafer Scrubber
DNS
SSW-636
9104
36
S36
Wafer Scrubber
DNS
SSW-627
9003
37
S37
Wafer Scrubber
DNS
SSW-629-B
9501
38
S38
Wafer Scrubber
DNS
SSW-636-B
3,4,5,6
8902
39
S39
Implanter (Medium Current)
Nisshin Electric
NH-20S
5,6
9203
40
S40
Implanter (Medium Current)
Nisshin Electric
SPCV1850U116-FL
9508
41
S41
Implanter (High Current)
TEL/VARIAN
80/10
9502
42
S42
Implanter (High Current)
AMAT
PI9500
9506
43
S43
Implanter (High Current)
Nisshin Electric
NH-40SR
9309
44
S44
APCVD
AMJ
AMS-2100
5,6
8709
45
S45
APCVD
AMAYA
AEC-2260
5,6
9505
46
S46
PECVD
ASM
EECVD
8802
47
S47
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9003
48
S48
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9403
49
S49
Sputtering System, Aluminum
Tokuda MFG
CCS-1400
8909
50
S50
Diffusion Furnace, Horizontal
TEL
DL-8P-473-SDDC
9304
51
S51
Diffusion Furnace, Horizontal
TEL
DL-8P-473LT-SDDC
9503
52
S52
Mask Aligner
Canon
PLA-501FA
8709
53
S53
Coater Developer
DNS
SKW-636-BV
5,6
9309
54
S54
Coater Developer (Polyimide)
DNS
SCW-524-BVQ
3,4,5,6
8603
55
S55
Developer (Polyimide)
DNS
DVW-423A
8703
56
S56
Curing Oven
Oshitari
SCOX-1300-H
8603
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
K69
Inspection Station
Canon
VIR-600
5,6
8703
2
K70
Wafer Particle Monitor System
Hitachi Deco
IS-1010
8909
3
K71
Wafer Particle Monitor System
Topcon
WM-3
8909
4
K72
Pattern Defect Review System
KLA-TENCOR
KLA2111
0103
5
K73
Pattern Defect Review System
KLA-TENCOR
KLA2131E
9610
6
K74
Overlay Measurement System
KLA-TENCOR
KLA5010
0109
7
K75
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE20
8509
8
K76
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE300
9201
9
K77
4 Point Probe
Kokusai Electric
VR-30A
8602
10
K78
Ellipsometer
Rudolph Research
2C.4C
8601
11
K79
Ellipsometer
Rudolph Research
AUTO.EL
4,5,6
8509
12
K80
Ellipsometer
Rudolph Research
SS1,4D
8703
13
K81
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
9509
14
K82
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
8603
15
K83
X-ray Analysis System
TECHNOS
TREX610
9309
16
K84
FTIR System
Nicolet Instruments
ECO-8S
8801
17
K85
CD SEM
Hitachi
S-6000
5,6
8808
18
K86
CD SEM
Hitachi
S-7000
9009
19
K87
CD SEM
Hitachi
S-7080
9303
20
K88
CD SEM
Hitachi
S-6200H
9506
21
K89
CD Measurement System
Nikon
LAMPAS-M3
3,4,5,6
8603
22
K90
CD Measurement System
Nikon
LAMPAS-HD
3,4,5,6
9203
23
K91
Inspection Station
Canon
VIR-600
5,6
8603
24
K92
Parametric Test System
Keithley
S350
8503
25
K93
Wafer Particle Monitor System
Hitachi
HILIS-200
4,5,6
8703
If interested in one or more items, please click here.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
8
Tamarack
T-300
Photo Lithography Tool
208V/15A
67W X 59D X 103H
If interested in one or more items, please click here.
Click here for next page.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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OLM Enterprises Semiconductor Equipment Resource Center
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