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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!! Please click here.
5 Inch Wafer Fab Equipment Available!!! Please click here for list.
6 Inch Wafer Fab Line Available!!! Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
Please feel free to search for the product you came for. Products in this site are Indexed by the FreeFind Search Engine .
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New Parts for Novellus Systems
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Semiconductor or Wafer Fab Equipment for Five Inch Wafers
Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.
Note 2: All equipment are store in clean/humidity-temperature controlled room.
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
S01
G-Line Stepper
Nikon
NSR1505G3A
8803
2
S02
G-Line Stepper
Nikon
NSR1505G3A
8808
3
S03
G-Line Stepper
Nikon
NSR1505G4BK
9303
4
S04
G-Line Stepper
Nikon
NSR1505G4D
8802
5
S05
G-Line Stepper
Nikon
NSR1505G4D
9509
6
S06
G-Line Stepper
Nikon
NSR1505G6E
5,6
9809
7
S07
G-Line Stepper
Nikon
NSR1505G6E
5,6
9109
8
S08
G-Line Stepper
Nikon
NSR1505G7E
9009
9
S09
I-B38Line Stepper
Nikon
NSR1505i7A
5,6
0103
10
S10
Resist Coater and Developer
DNS
SKW-636BVP
5,6
9903
11
S11
Deep UV Curing System
Ushio Electric
UMA-802-H6
8802
12
S12
Deep UV Curing System
Ushio Electric
UMA-802-HC57MS
5,6
9201
13
S13
Character Exposure System
Canon
AIM-630
5,6
8708
14
S14
Lamp Annealing System
DNS
LAW-6L3-A
8801
15
S15
Lamp Annealing System
DNS
LAW-815
5,3
9503
16
S16
Dry Etcher
Tokya Ohka
OAPM-301B
8603
17
S17
Dry Etcher
Tokya Ohka
TCE-2600
9104
18
S18
Dry Etcher
Tokya Ohka
OPM-A1250
8802
19
S19
Dry Etcher
Tokya Ohka
OPM-A1200
8409
20
S20
Dry Etcher
Tokya Ohka
OAPM-A1200
8703
21
S21
Dry Etcher
Alcantec
MAS-801
5,6
9610
22
S22
Dry Etcher
Alcantec
MAS801-HR
0102
23
S23
Dry Etcher (Polysilicon)
Hitachi
M216A-2
5,6
9703
24
S24
Dry Etcher (Polysilicon)
Tokyo Ohka
OAPM-406
9409
25
S25
Dry Etcher (Polysilicon)
Hitachi
M216A-2
9703
26
S26
Dry Etcher (Oxide)
TEL
TE-5000
5,6
9703
27
S27
Dry Etcher (Oxide)
TEL
TE-4000
9703
28
S28
Dry Etcher (Oxide)
TEL
TE-8400S
9703
29
S29
Dry Etcher (Oxide)
TEL
TE-8400PE
9701
30
S30
Dry Etcher (Oxide)
Tokyo Ohka
OAPM-301B
8509
31
S31
Dry Etcher (Oxide)
Anelva
ILD-4003
8509
32
S32
Dry Etcher (Oxide)
Anelva
ILD-4013T
9503
33
S33
Dry Etcher (Metal)
Hitachi
M308AT
9011
34
S34
Plasma Etcher
Tokyo Ohka
OPM-A1200
8503
35
S35
Wafer Scrubber
DNS
SSW-636
9104
36
S36
Wafer Scrubber
DNS
SSW-627
9003
37
S37
Wafer Scrubber
DNS
SSW-629-B
9501
38
S38
Wafer Scrubber
DNS
SSW-636-B
3,4,5,6
8902
39
S39
Implanter (Medium Current)
Nisshin Electric
NH-20S
5,6
9203
40
S40
Implanter (Medium Current)
Nisshin Electric
SPCV1850U116-FL
9508
41
S41
Implanter (High Current)
TEL/VARIAN
80/10
9502
42
S42
Implanter (High Current)
AMAT
PI9500
9506
43
S43
Implanter (High Current)
Nisshin Electric
NH-40SR
9309
44
S44
APCVD
AMJ
AMS-2100
5,6
8709
45
S45
APCVD
AMAYA
AEC-2260
5,6
9505
46
S46
PECVD
ASM
EECVD
8802
47
S47
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9003
48
S48
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9403
49
S49
Sputtering System, Aluminum
Tokuda MFG
CCS-1400
8909
50
S50
Diffusion Furnace, Horizontal
TEL
DL-8P-473-SDDC
9304
51
S51
Diffusion Furnace, Horizontal
TEL
DL-8P-473LT-SDDC
9503
52
S52
Mask Aligner
Canon
PLA-501FA
8709
53
S53
Coater Developer
DNS
SKW-636-BV
5,6
9309
54
S54
Coater Developer (Polyimide)
DNS
SCW-524-BVQ
3,4,5,6
8603
55
S55
Developer (Polyimide)
DNS
DVW-423A
8703
56
S56
Curing Oven
Oshitari
SCOX-1300-H
8603
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
K69
Inspection Station
Canon
VIR-600
5,6
8703
2
K70
Wafer Particle Monitor System
Hitachi Deco
IS-1010
8909
3
K71
Wafer Particle Monitor System
Topcon
WM-3
8909
4
K72
Pattern Defect Review System
KLA-TENCOR
KLA2111
0103
5
K73
Pattern Defect Review System
KLA-TENCOR
KLA2131E
9610
6
K74
Overlay Measurement System
KLA-TENCOR
KLA5010
0109
7
K75
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE20
8509
8
K76
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE300
9201
9
K77
4 Point Probe
Kokusai Electric
VR-30A
8602
10
K78
Ellipsometer
Rudolph Research
2C.4C
8601
11
K79
Ellipsometer
Rudolph Research
AUTO.EL
4,5,6
8509
12
K80
Ellipsometer
Rudolph Research
SS1,4D
8703
13
K81
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
9509
14
K82
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
8603
15
K83
X-ray Analysis System
TECHNOS
TREX610
9309
16
K84
FTIR System
Nicolet Instruments
ECO-8S
8801
17
K85
CD SEM
Hitachi
S-6000
5,6
8808
18
K86
CD SEM
Hitachi
S-7000
9009
19
K87
CD SEM
Hitachi
S-7080
9303
20
K88
CD SEM
Hitachi
S-6200H
9506
21
K89
CD Measurement System
Nikon
LAMPAS-M3
3,4,5,6
8603
22
K90
CD Measurement System
Nikon
LAMPAS-HD
3,4,5,6
9203
23
K91
Inspection Station
Canon
VIR-600
5,6
8603
24
K92
Parametric Test System
Keithley
S350
8503
25
K93
Wafer Particle Monitor System
Hitachi
HILIS-200
4,5,6
8703
If interested in one or more items, please click here.
Five Inch Wafer Fab or Semiconductor Processing Equipment List - C2B
Lot #
Equipment
Model
Serial #
Asset #
76
BTU Bruce w/ 7355 Controller
BDF 41
N/A
N/A
78
Wet Sink
Sulfuric w/ HF
N/A
80090
79
Semitool SRD
870 Dual w/ res mtr
N/A
80175
80
BTU Bruce w/ 7355 Controller
BDF 41
N/A
80081
81
BTU Bruce w/ 7355 Controller
BDF 41
N/A
80082
82
MGI
RapidTran II
N/A
880152
83
Semitool SRD
870 Dual w/ res mtr
N/A
80176
84
Wet Sink Ultrafab
HF Sulfuric / BOE
N/A
80091
85
SEMIX Tazmo
TR6132UD
693130
80101
86
MGI
Challenger I
N/A
N/A
87
BTU Bruce w/ 7355 Controller
BDF 41
N/A
80083
88
BTU Bruce w/ 7355 Controller
BDF 41
N/A
80084
89
MGI
Challenger I
N/A
N/A
91
Wet Sink
Sulfuric w/ HF
N/A
N/A
92
Semitool SRD
870 Dual w/ res mtr
N/A
80018
93
BTU Bruce w/ 7355 Controller
BDF 41
N/A
N/A
94
Wet Sink
Phosphoric/HF
N/A
80094
95
Semitool SRD
870 Dual
N/A
N/A
96
MGI
Challenger I
N/A
N/A
97
Tencor
Surfscan 164
N/A
N/A
99
Semitool SRD
870 Dual w/ res mtr
N/A
N/A
100
Verteq
Megasonic
N/A
80098
101
Lumonics
Laser Mark II
N/A
N/A
102
Nanometrics
Nanospec 200
0686-3119
N/A
103
Rudolph Research
LPIII, 2B, 4A
7407
N/A
104
Rudolph Research
LPIII, 2B, 4A
7444
N/A
105
Nikon Microscope
Optiphot 66
227352
80369
106
Nikon Microscope
Optiphot 66
227389
N/A
107
Tektronics
Curve Tracer 576
N/A
N/A
108
Signatone
Manual Prober
N/A
N/A
109
Prometrics
Omnimap RS30
N/A
N/A
110
MDC
CV Plotter
N/A
880003
111
Olympus Microscope
VHJML
2700586
N/A
112
Semitool SRD
870 Dual
N/A
80110
114
MRC Sputter
Eclipse
N/A
N/A
115
IPC Branson 12" 2 Gas Stand Alone
S3100
N/A
N/A
116
Wet Sink
BOE w/ HF
N/A
N/A
117
MGI
Challenger I
N/A
80118
118
Semitool SRD
870 Dual
N/A
80111
120
Varian Sputter
3180
84210-182
80086
121
Varian Sputter
3180
84202-173
80087
122
IPC Branson Stand Along 2 Gas
S3100
mp-297
N/A
123
Blue M Oven
MP-326SF-1
N/A
80132
124
IPC Branson
S3075
N/A
80128
126
Eaton
NV 10-160
N/A
80126
131
VERSATEST
VT 1000
N/A
80289
132
VERSATEST
VT 1000
15567
80290
133
COLE PALMER OVEN
9012
100196
N/A
134
Polaroid Land Camera
MP-4
J67860
80253
135
Protocol Analyzer
4955A
N/A
N/A
140
Photocopy Canon
NP 3825
VEB08321
80258
141
Blue M Oven
AGC7 146GX
A3-3012
80249
142
Blue M Oven
CR07 146B/C
P40-105
80247
143
Teledyne TAC
PR 51
N/A
N/A
144
INTERMEC
3400
N/A
80259
145
SIGNATONE Manual Prober
S-250-5
191
N/A
146
SPECTROLINE
PC-8820
134414
80250
152
DATAPRODUCTS
8600-002
26C48625-8600
80317
153
Parallel System
N/A
N/A
80302
154
Parallel System
N/A
N/A
80303
155
DATA GENERAL
N/A
N/A
80215
156
SENTRY
Series 20
N/A
80314
158
Marking System
U14455PM
882166
80312
159
Marking System
510
890357
80313
167
Hewlett-Packard
4062UX
2519J00228
80550
170
ANDO Memory Test System
DIC-8042-A
N/A
80211
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E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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OLM Enterprises Semiconductor Equipment Resource Center
Copyright ©1999 OLM Enterprises
