Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc.
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!!
Capacity: 15 thousand wafers/mo, .8 um, CMOS
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5 Inch Wafer Fab Equipment Available!!!
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6 Inch Wafer Fab Line Available!!!
Capacity: 20 thousand wafers/mo, .5 um, CMOS
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Note: All systems and fabs are subject to availability at time and date of inquiry.
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Used Vertical Furnace, TEL LPCVD System, 6 & 8 Inch
Used Kokusai Vertical Furnace System, 8 Inch
Hewlett Packard Tester IV HP-4071
Surplus Semiconductor Equipment
Other Equipment:
Eaton Nova Ion Implanter, NV-10-160, 4 Inch
Eaton/Axcelis GSD-200, Eight Inch, High Current Ion Implant System, S/N 080280
Eaton NV8250P, 6 Inch, Medium Current Ion Implanter
Varian Ion Implanter, 8 Inch, High Energy Ion Implantation System, Model: G1510
Automatic Resistivity Meter
Diamond Blades by Disco Abrasive Company for Sale
4 Inch Semiconductor Equipment for Sale
Item
Equipment/Description
Model/Serial No.
Manufacturer
Comments
1
Vertical Furnace, LPCVD System, 6 and 8 Inches
Alpa 8SE-C, M00009860061
TEL
Used for Poly deposition process. One and a half year usage. Supplied by Tokyo Electron Ltd. Equipment is in crate. Some spare parts included.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Item
Equipment/Description
Model/Serial No.
Manufacturer
Comments
1
Kokusai Vertical Furnace System, 8 Inch
Vertron DJ-803V
Kokusai
Used for Nitride, Poly, and Teos processes. One large crate of spare parts is available. To be sold "As-Is", "Where-Is".
Submit reasonable offers for immediate consideration.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Note: 0.3 micron technology, 17 to 21 photoresist levels, 150mm wafers.
Item
Equipment/Description
Model/Serial No.
Manufacturer
Comments
1
Tester
TESTER IV HP-4071
Hewlett-Packard, HP
System includes: 3458A voltmeter, software, programmable power supply, LCR, capacitance meter 4284, HP handler and HP computer.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Surplus or Excess Semiconductor Equipment
1 Ea - Dynatech Laboratories Immunoassay System with Microplate Reader , and Incubator Stacker
Hitachi Model S-570 Scanning Electron Microscope
Model Access 60 75 W CO2 /5 mW HeNe Laser
Instrumentation Laboratories Model 661-10 Chemistry Analyzer
Lumiscan Model 150 Lumiscan
Perking-Elmer Model Lambda 31 UV/VIS Spectrophotometer
Spectra-Physica Model 270 Laser Exciter
Spectra-Physics Model SP4270 Integrator
Tektronix Model 1480R WaveForm Monitor
Tektronix Model 528 WaveForm Monitor
Tektronix Model 1420 NTSC VectroScope
UniLase Code # 2100 CO2 Laser
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Note: All equipment are subject to availability at time and date of inquiry
Contents
I. Wet Bench . . . Totally New
II. Fluoroware Cassetes with Carriers for 6 Inches Wafers, Model E160
Material . . . STAT-PRO 175 (polipropylene and carbon).
.5 degrees wafer tilt from vertical reduces wafer movement and avoids particle generation.
Capacity for 25 wafers and stackable.
Quantity available . . . 3,000 cassetes with carriers.
Fluoroware carrier for 25 wafers, Model KA 182
Polieterketone (PEK) material
Made of dissipative blend made of polyetherketone and carbon fiber
III. Nitrogen and Oxygen Purifying System Manufactured by SAES Getters
System includes:
One OPAL S-26 cabin. Inside it, the following equipment are included:
Oxygen Mega Torr Purifier, Model PS6MG15-O-S26
Nitrogen Mega Torr Purifier, Model PS8-MG1500-N-S26
PCDAS & Fixed Analytical Rack
Mobile Analytical Cart
Carrier HVAC Mod. 50SS060
The OPAL S-26 cabin includes air conditioning system, Carrier model 50SS060 for facilitating the proper functioning of the control equipment and gas analyzers.
The system also includes AMETEK oxygen analyzers, humidity 5900UHP and particle as well as condensation nucleus counter MET-ONE, in a portable cart for analyzing nitrogen as well as the humidity and particles ina fixed rack.
At this cabin, the purifiers PS6-MG15-O-S26 for oxygen and PS8-MG1500-N-S26 for nitrogen are mounted.
It also has PCDAS for data retrieval. The OPAL has the necessary installation ports or adapters for working once connecting the required services as nitrogen, oxygen, power, air, water and hydrogen and is capable to purify Nitrogen and Oxygen simultaneously.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Item
Equipment/Description
Model/Vintage
Manufacturer
Comments
1
High Current Ion Implanter
NV-10-160, 1993
EATON
Configured for 4 inch wafers. Very good working condition. Equiped with automatic loading system -AT-4. Purchased new in 1993, installed in 1994 by EATON's technical group.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Configuration
Configured for 200 mm wafers
Manufactured Date: May, 1996
CE Marked System
Interface:
Sun Spac V computer
MTI floppy and backup drive
Sun service monitor
Software version 4.4.2.1
SECS I/O interface
Programmable tilt angle: -10 to +10
Dose range: 1.0 E11 to 1.0 E17 ions/cm squared
Energy range: 10 to 180 keV
ASYST wafer handler
4 cassette stages
Extra sources: Enhanced without vaporizer
Macrobot, s/n 95497
Oil-filled transformer
Auxiliary equipment:
Chiller: Neslab, s/n C95128144
Pumps:
Ebara 40x20 tur backup, s/n 956274
Ebara 40x20 end station pump, s/n 156270
Seiko H2000C turbo, s/n 0274R
CTI CT8 beamline, s/n 32C8916481
CTI CT10 end station, s/n 1389406376
Cryo compressors:
CTI 8300, s/n 85C0006349
CTI 8500, s/n 68B9608751
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Note: Subject to availability at time and date of inquiry.
Contents
Vital Information and Configuration:
Purchased 10/25/1998
Configured for 6 inch wafers
Sun Sparc 5 Operating System
Software version 3.5.2i
8 mm tape backup
Extended life source (VLS)
Remote monitor
Miscellaneous parts of $100,000 spare parts kit remaining
2 extra sources, approx $40,000 each
Seiko-Seiki turbos:
2 with STP 100C controller
1 STP 300C
Up to 750 keV with triple charge
4x SDS gas box (subatmospheric delivery system)
Edwards DP40 W/ 350 blower for end station/load lock
3 CTA on-board cryos
2 Edwards DP40's for chamber
Neslab chiller
ESC chuck
Power conditioning/isolation transformer
Front End:
3 load cassettes
Flat finder
Buffer cassette
Macrobot robot (standard)
Programmable flat orient (27.5 deg default)
Wafer rotation
Programmable auto tilt, 0 to 89 degrees
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Configuration
Year of Installation: 1996
200MM Batch
9 Site Disk
180 Wafers per Hour
40 Kev to 3 Mev Energy Range
EBARA 40X20 Backing Pumps
Seiko-Seiki STP-H2000C and Varian XXX Turbo Pumps
CTI Cryo pumps
Up to 35 Degree Implant Angle
Touch Screen User Interface
(1) Triple Charge Implant
1 Million Volts
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Item
Equipment/Description
Model/Vintage
Manufacturer
Comments
1
Automatic Resistivity Meter
FPP 5000 (4 Point Probe)
MILLER DESIGN & EQUIPMENT
Very good condition. Includes stardards (control wafers) for sheet resistivity, slice resistivity and metal thickness.
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Type of blades:
NBC - ZB - 204J 50.2 X 0.020 X 40 mm 79 pcs
NBC - Z - 1060 50.4 X 0.025 X 40 mm 429 pcs
NBC - Z - 1060 50.6 X 0.030 X 40 mm 399 pcs
NBC - Z - 1060 50.2 X 0.020 X 40 mm 379 pcs
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
Equipment List
Front End
1. 4 Inch Coaters/Developers
EATON 6000XL
Vintage: 1991
5 Units, Good Working Condition
3-Track System
Track 1: Indexer, coating spinner - hot plate - hot (cool) plate-indexer
Track 2: Indexer, hot plate-hot(cool) plate-indexer
Track 3: Indexer, developing spinner - hot plate - hot(cool) plate-indexer
2. 4 Inch Developer System
MILTIFAB
Vintage: 1992
With arm robots and hot platees
2 Units
Very Good Working Condition
3. 4 Inch Wafer Steppers
GCA, Mann 6100
G-line, 5:1 reduction, Maximus 1000
Equiped with climatic chambers
2 Units
Very Good Condition
4. 4 Inch Wafer Steppers
GCA, Mann 6300
G-line, 5:1 reduction, Maximus 1000
Equiped with climatic chambers
7 Units
Very Good Condition
5. 4 Inch Magnetron Sputtering System
Varian 3190
Vintage: 1990
Refurbished in year 2000 in USA
6. Magnetron Sputtering System
Leybold-Heraeus Z-650
Vintage: 1992
Very Good Condition
7. Magnetron Sputtering System
BALZERS, BAK 450
Vintage: 1988
Very Good Working Condition
8. Ion Implanters
ULVAC IM-2000MH (License DF-4-Varian)
Vintage: 1988
Very Good Working Condition
2 Units + 2 Units for Spares
9. Plasma Etchers, 6 Units
ALCATEL, GIR 220
Vintage: 1988
2 Units for Si3N4/Poly-Si, 2 Units for Oxide, and 2 Units for Metal
Good Condition
10. Plasma Etchers
Applied Materials 8120
Applied Materials 8130
Vintage: Both 1989
Both are in working condition
11. 4 Inch CVD Reactors
ASM-mPCVD 210
RH, 4 Tubes (Si3N4, Poly-Si, LTO, PSG)
Vintage: 1989
Very Good Condition
12. Diffusion Furnaces
ASM 210
RH, 4 Tubes
Soft Contact Loading
MFC Gas Flow System
Vintage: 1989
4 Units Available
13. Laser Marking System
LASERMARK LUMONICS 345
Vintage: 1990
Good Condition
Back End
1. Molding Presses
ASM-FICO-100
Vintage: 1990
2 Units, Very Good Condition
2. Trim and Form Presses
ASM-FICO-TFX-2A
Vintage: 1990
2 Units, Very Good Condition
3. Dicing Saw
DISCO DFD 3D08
Vintage: 1988
1 Unit + 1 Unit for Spares
4. Wire Bonder
ASM AB 308A
Vintage: 1990
Good Condition
1 Unit
5. Wire Bonder
K&S 1470-3
Refurbished in 2001 by LUNA TECH (USA)
Very Good Condition
6. Automatic Wire Bonder
KAIJO DENKI 1435A, w/ automatic transport for 16, 24, 28, and 40 pin lead-frames
Vintage: 1988
2 Units, Very Good Condition
7. Automatic Wire Bonder
SHINKAWA SWB FA UTC-5, w/ automatic transport for 16, 28, and 40 pin lead-frames
Vintage: 1988
2 Units, Very Good Condition
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Note: All Products: Subject to availability at time and date of inquiry.
Contents
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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