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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!!
Capacity: 15 thousand wafers/mo, .8 um, CMOS
Please click here.
5 Inch Wafer Fab Equipment Available!!!
Please click here for list.
6 Inch Wafer Fab Line Available!!!
Capacity: 20 thousand wafers/mo, .5 um, CMOS
Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
Please feel free to search for the product you came for. Products in this site are Indexed by the FreeFind Search Engine .
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CD SEM, Hitachi S-8840
Specifications
Wafer size: 8 inches
Image Resolution: X110 (optical microscope)
X1,000 - 150,000 (sem image)
Meas. Mode: automatic edge detection, definable algorithms
Meas. Range: 0.1 - 10 micrometer
Reproducibility: +-1% or 5 nanometer (3 sigma) whichever is greater
Objective lens: highly excited low abberation type
Movement: 200 mm X 200 mm
Speed: 50 nm/sec
Auto Loader: 2 cassette random access
Automatic wafer alignment using optical microscope
Throughput: 20 wafers/hr (5 pt meas. Continuous operation)
Vacuum System: Fully automatic dry vac system with 3 ion pumps, 2 turbo pumps and 2 rotary pumps
Conversion to 6 inch wafers . . . . . Option
Reference: Stxi813-S8840
Please call or click here to inquire for prices. Please include reference.
Note: Subject to availability at time and date of inquiry.
Refurbished Semiconductor Equipment, SEM, Scanning Electron Microscopes, KLA Measurement Systems, Etc.
Hitachi S-2700 Lab 6 SEM
Hitachi S-806C FE-SEM with EDS system (Oxford X-Ray) and infrared chamberscope, very good condition, 8 inch wafer capable
Hitachi S-6000 CD-SEM, with new proprietory PC and software
Hitachi S-8640 CD-SEM for R-W head and mask reticle inspection, High throughput
Hitachi S-8820 CD-SEM
Hitachi S-4500 FE-SEM
Hitachi S-6280 CD-SEM
Hitachi S-570 SEM with LAB6 source
SEMTRONIX 791 RIE with 6 process gases, can be used for delayering 12 inch wafers or any wafer size & package
KLA 5000 CD-SEM measurement system
KLA 5107 Overlay inspection system
KLA 5100 Overlay inspection system
KLA 2131E Defect inspection system
MICRION 9800 Focused Ion Beam FOR 8 inch wafer, good for cross section in micro area
Perkin-Elmer 660 Auger Electron Microscopy, like new
ALESSI 2100 probe station
LEITZ Ergoplan 200 Laser microscope, auto focus
JEOL JSM-ICA848A SEM wafer inspection system
JEOL FIB 500 Focused Ion Beam Milling System
JEOL 100CX TEM
JEOL 840 Field Emission SEM
JEOL 5600 SEM
JEOL 1010 TEM
JEOL 6340 Field Emission SEM + Noran Voyager X-Ray
JEOL 4000 EX TEM 400 kv
JEOL 200 CX TEM 200 kv
JEOL 1200 EX TEM 120 kv
JEOL FX-90Q NMR + Tecmag
JEOL T330 SEM
FEI 300 Focus Ion Beam
PHI 600 Scanning Auger with PC upgrade
PHI 670 Hres Scanning Auger system
PHI 5200 XPS System Based on PHI 10-360 SCA
PHI 660 Scanning AES system with PC Upgrade
MRC Summit Inline Sputtering System
3500 SIMSII Dynamic SIMS, includes 06-600 Spherical SIMS Energy analyzer, 1-255AMU RF generator, 16mm Quadrupole, 32-055 SIMS controller, 32-600 Quadrupole control, 02 leak valve, 1120 amplifier discriminator, all cables and manuals
VG 310 XPS, AES
ISI 193 Mcrostep stepper, 193 nm with spare Cymer Laser
Dynatex DX III Scriber, Windows Operating System
LEEDS 10-180 & 11-020 controller. This unit has been used only once, and has been stored under vacuum
Semitool 860D Spin-Rinse-Dryer
Semitool 870D Spin-Rinse-Dryer
EDAX EX-4 EDS system for conventional SEM
Reference: Stxi7133a
If interested in any item above, please click here. Please include reference.
Note: All products are subject to availability at time and date of inquiry.
Semiconductor Equipment and Major Components For Sale
Item
Manufacturer
Description
Model
Year/Serial Number
Qty
1
Advantex
Balance Power Tool
T3402 Servo
1
2
Air Product
SF-6 Gas Cabinet
801-4701693
14038-95026756V
1
3
Biorad
FTIR
FTS-40
April, 93/8665
1
4
DESPATCH
Burn-In Tester w/ DC Controller
PBC2-16
150648-L
4
5
DESPATCH
Burn-In Tester w/ DC Controller
3
6
FSI
Polaris
1
7
FSI/Excalibur
Brand New/12-18-98 Decon
901499-316
May, 95/0902-0139-0595
1
8
Fusion System
1300P
1024
1
9
HP 83000
HP EZ816A
83000
3529G00142
1
9A
HP 83000
Main Frame X1
1
9B
HP 83000
TestHead X1
1
9C
HP 83000
Chiller X1
1
9D
HP 83000
Chiller X1
Computer & Accessories
HP735/125 & HP725100
1
10
IBM
Mask Inspection Tool
C-4 Mask IVIS
MH6161
1
11
IPM
Internation Power Making
15KBA
Feb, 96/112054
1
12
KLA
Defect Review Station
2552X
Aug, 95/W25XX732
1
13
KLA
Defect Review Station
2532
Feb, 96/W21XX748
1
14
KLA
2525
Sept, 91/WO25xx193
1
15
KLA/TENCOR
Surfscan
AIT1/8010
Aug, 97/897-8124
1
16
LAURIER
Die Pick & Place for 8"
DS6000-8
2261
1
17
MARKEM
Flame Treatment
1
18
Motorola
Ceramic BGA
MMS02ACS
1
19
MPM
Wafer Bumps Printer
WP-1
Dec, 97/101-9458
1
20
Prometrix
Film Thickness Porhe
FT-500
June, 91/9105F1
1
21
Prometrix
Auto Loader
C2C-FT
9105C8
1
22
REEDHOLM
Parametric Tester
Oct, 89/345
1
23
REEDHOLM
Parametric Tester
Oct, 89/346
1
24
REEDHOLM
Image Computer for RI-20
2
25
TEL
Prober
80W
Oct, 97/8WA2302-2
2
26
TEL
Prober
80W
May, 92/8W3104
1
27
TEL/KLA
Prober
KLA 1200
May, 93/8W4301 STG-1
1
28
TEL/KLA
Prober
KLA 1200
8W3104-1
1
29
TEL/KLA
Prober
KLA 1007 HF
June, 89/250044
1
30
TEL/KLA
Prober
80W/1220
4
31
TEL/KLA
Small Footprint Manipulator
7
32
KLA
Prober
Parts Machine
3
33
TERADYNE
Manipulator RAM
OM971FF
Oct, 95/378
1
34
TSK
Prober
A-PM-88A
Aug, 91/F175010891
1
35
HITACHI
CD-SEM
S-6280
1
36
Nikon
Microscope
Optihot
1
Reference: Stxi7133b
If interested in one or more items, please click here. Please include reference.
Note: All products are subject to availability at time and date of inquiry.
New Parts for Novellus Systems
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Semiconductor or Wafer Fab Equipment for Five Inch Wafers
Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.
Note 2: All equipment are store in clean/humidity-temperature controlled room.
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
S01
G-Line Stepper
Nikon
NSR1505G3A
8803
2
S02
G-Line Stepper
Nikon
NSR1505G3A
8808
3
S03
G-Line Stepper
Nikon
NSR1505G4BK
9303
4
S04
G-Line Stepper
Nikon
NSR1505G4D
8802
5
S05
G-Line Stepper
Nikon
NSR1505G4D
9509
6
S06
G-Line Stepper
Nikon
NSR1505G6E
5,6
9809
7
S07
G-Line Stepper
Nikon
NSR1505G6E
5,6
9109
8
S08
G-Line Stepper
Nikon
NSR1505G7E
9009
9
S09
I-B38Line Stepper
Nikon
NSR1505i7A
5,6
0103
10
S10
Resist Coater and Developer
DNS
SKW-636BVP
5,6
9903
11
S11
Deep UV Curing System
Ushio Electric
UMA-802-H6
8802
12
S12
Deep UV Curing System
Ushio Electric
UMA-802-HC57MS
5,6
9201
13
S13
Character Exposure System
Canon
AIM-630
5,6
8708
14
S14
Lamp Annealing System
DNS
LAW-6L3-A
8801
15
S15
Lamp Annealing System
DNS
LAW-815
5,3
9503
16
S16
Dry Etcher
Tokya Ohka
OAPM-301B
8603
17
S17
Dry Etcher
Tokya Ohka
TCE-2600
9104
18
S18
Dry Etcher
Tokya Ohka
OPM-A1250
8802
19
S19
Dry Etcher
Tokya Ohka
OPM-A1200
8409
20
S20
Dry Etcher
Tokya Ohka
OAPM-A1200
8703
21
S21
Dry Etcher
Alcantec
MAS-801
5,6
9610
22
S22
Dry Etcher
Alcantec
MAS801-HR
0102
23
S23
Dry Etcher (Polysilicon)
Hitachi
M216A-2
5,6
9703
24
S24
Dry Etcher (Polysilicon)
Tokyo Ohka
OAPM-406
9409
25
S25
Dry Etcher (Polysilicon)
Hitachi
M216A-2
9703
26
S26
Dry Etcher (Oxide)
TEL
TE-5000
5,6
9703
27
S27
Dry Etcher (Oxide)
TEL
TE-4000
9703
28
S28
Dry Etcher (Oxide)
TEL
TE-8400S
9703
29
S29
Dry Etcher (Oxide)
TEL
TE-8400PE
9701
30
S30
Dry Etcher (Oxide)
Tokyo Ohka
OAPM-301B
8509
31
S31
Dry Etcher (Oxide)
Anelva
ILD-4003
8509
32
S32
Dry Etcher (Oxide)
Anelva
ILD-4013T
9503
33
S33
Dry Etcher (Metal)
Hitachi
M308AT
9011
34
S34
Plasma Etcher
Tokyo Ohka
OPM-A1200
8503
35
S35
Wafer Scrubber
DNS
SSW-636
9104
36
S36
Wafer Scrubber
DNS
SSW-627
9003
37
S37
Wafer Scrubber
DNS
SSW-629-B
9501
38
S38
Wafer Scrubber
DNS
SSW-636-B
3,4,5,6
8902
39
S39
Implanter (Medium Current)
Nisshin Electric
NH-20S
5,6
9203
40
S40
Implanter (Medium Current)
Nisshin Electric
SPCV1850U116-FL
9508
41
S41
Implanter (High Current)
TEL/VARIAN
80/10
9502
42
S42
Implanter (High Current)
AMAT
PI9500
9506
43
S43
Implanter (High Current)
Nisshin Electric
NH-40SR
9309
44
S44
APCVD
AMJ
AMS-2100
5,6
8709
45
S45
APCVD
AMAYA
AEC-2260
5,6
9505
46
S46
PECVD
ASM
EECVD
8802
47
S47
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9003
48
S48
Sputtering System, Aluminum
TEL/VARIAN
VARIAN-3180
9403
49
S49
Sputtering System, Aluminum
Tokuda MFG
CCS-1400
8909
50
S50
Diffusion Furnace, Horizontal
TEL
DL-8P-473-SDDC
9304
51
S51
Diffusion Furnace, Horizontal
TEL
DL-8P-473LT-SDDC
9503
52
S52
Mask Aligner
Canon
PLA-501FA
8709
53
S53
Coater Developer
DNS
SKW-636-BV
5,6
9309
54
S54
Coater Developer (Polyimide)
DNS
SCW-524-BVQ
3,4,5,6
8603
55
S55
Developer (Polyimide)
DNS
DVW-423A
8703
56
S56
Curing Oven
Oshitari
SCOX-1300-H
8603
Item #
Ref #
Equipment Name
Manufacturer
Model
Size
Original Acquisition Date
1
K69
Inspection Station
Canon
VIR-600
5,6
8703
2
K70
Wafer Particle Monitor System
Hitachi Deco
IS-1010
8909
3
K71
Wafer Particle Monitor System
Topcon
WM-3
8909
4
K72
Pattern Defect Review System
KLA-TENCOR
KLA2111
0103
5
K73
Pattern Defect Review System
KLA-TENCOR
KLA2131E
9610
6
K74
Overlay Measurement System
KLA-TENCOR
KLA5010
0109
7
K75
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE20
8509
8
K76
Al Film Thickness Measurement System
KLA-TENCOR
M-GAGE300
9201
9
K77
4 Point Probe
Kokusai Electric
VR-30A
8602
10
K78
Ellipsometer
Rudolph Research
2C.4C
8601
11
K79
Ellipsometer
Rudolph Research
AUTO.EL
4,5,6
8509
12
K80
Ellipsometer
Rudolph Research
SS1,4D
8703
13
K81
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
9509
14
K82
Film Thickness Measurement System
NANOMETRICS
NANOSPECT/AFT
8603
15
K83
X-ray Analysis System
TECHNOS
TREX610
9309
16
K84
FTIR System
Nicolet Instruments
ECO-8S
8801
17
K85
CD SEM
Hitachi
S-6000
5,6
8808
18
K86
CD SEM
Hitachi
S-7000
9009
19
K87
CD SEM
Hitachi
S-7080
9303
20
K88
CD SEM
Hitachi
S-6200H
9506
21
K89
CD Measurement System
Nikon
LAMPAS-M3
3,4,5,6
8603
22
K90
CD Measurement System
Nikon
LAMPAS-HD
3,4,5,6
9203
23
K91
Inspection Station
Canon
VIR-600
5,6
8603
24
K92
Parametric Test System
Keithley
S350
8503
25
K93
Wafer Particle Monitor System
Hitachi
HILIS-200
4,5,6
8703
If interested in one or more items, please click here.
Wafer Fab, High Vacuum Systems, R & D Semiconductor Equipment
New Busch Vacuum Pumps
Item
Manufacturer
Model/Description
Qty
Serial No.
CFM
Condition
1
Busch
BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ
1
C0019000142
21
New, no box
2
Busch
BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ
1
PB03680101
250
New in Box
Won't last. Call for highly attractive prices.
Turbo Pump, Brand New
Seiko-Seiki, Model STPH 1000C, with controller, cables, and accessories, still factory sealed.
Hurry!!! Won't last!!!
Wafer Fab For Sale:
6" Wafer Fabrication running with 0.8 micron linewidth Capable of doing 20,000 wafer with fifteen masking steps
Buyer's benefit or advantage: Seller is willing to buy back current product for one year with a possible low volume thereafter.
MRC Sputter System, Rebuilt
Model: Pre-Star
Serial No. 1031176
Year Mfg: 1989
Upgrade, 2/96: ENI SS RF generators, Soft-etch, onboard retrofit cryo diffuser ring, 8" cryo on loadlock, Ar purifier for system.
Process Chambers: 1 Etch and 3 Sputters
Hurry!!! System has never been used sinced purchased as rebuilt.
Total Invoice Amount was over a million dollars, call immediately for the best price!!!
Varian Sputtering System
Model: 3180
Serial No.: 84340-257
Wafer Size: 4"
Major Components:
DC Power Supply, 12KW, 3 Ea
Fluke 1722B Instrument Controller
MKS Type 250B Controller
Eurotherm Heater Controllers, 3 Ea
Varian Wise Thin Film Monitor
HP 3438A Multimeter Film Thickness Monitor
Varian Wafer Process Controller
Varian Wafer Loader Controller
Varian Interlock & Control Chassis
Varian Conmag P/S Remote Monitor
Varian Vacuum System Controller
Varian 845 Vacuum Ionization Gauge
Varian RF Matching Controller
Varian Cassette Motor Controller
CTI Cryo On-Board Cryo Pump with Compressor
Leybold, D-30 Mechanical Pump
Hurry!!! Call for Price. Won't Last!!!
Applied Materials Etch System
Precision 5000 Mark II Etch
MxP Mainfram Etch System
Precision 5000 Mark II Etch MxP System Mainframe
Two Polysilicon/Polycide Etch UniChambers
Polycide MxP Etch Process Kit
Voltage/Frequency: 208 VAC, 60 hZ
Hurry!!! Call for price and more details.
ULVAC, Ceraus Z-1000 Titanium Nitride Sputtering System
Operation Period: Less than 2 years
urrent Wafer Size Setup: Six Inch (6")
Condition: Excellent
The "LUCKY" buyer takes all spares worth $$$$$$, so hurry!!!
Applied Materials, 8115 Oxide Etcher
Condition: Excellent
Current Wafer Setup Size: Six Inch, (6")
Just came out from the wafer fab, complete.
Applied Materials, AME-7810 Epitaxy System
Rebuilt to customer's specifications
Site installation and startup available
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
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OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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