Semiconductor Equipment: Vacuum Systems, Pumps, Blower, and Power Supplies
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We completely rebuild systems, and offer them with a 90 day warranty. We also do special modifications on these systems. We can configure many of these systems to your specifications. A complete source inspection at our facility is possible. Please see the following lists of our current inventory.
Equipment Purchasing/Trade
We will also buy your equipment, and take your systems in trade.
Equipment Spare Parts
We carry many spare parts for the systems listed below, specifically Branson/IPC, Drytek, Gasonics, LFE, Technics, Tegal, etc. Also, we have vacuum related products and fluids, and RF Power Tubes.
Equipment Repair/Service
We will completely rebuild your system at our facility, or service your system at your location. Our service rate plus travel expenses.
Plasma Processing
We have equipment installed at our facility to do surface treating and cleaning of your parts. This service can usually be performed within 24 hours.
Note:
All items included in the following table and list are subject to prior sale or availability upon time and date of inquiry.
Vacuum Systems
Item
Qty
Description
1
1 Ea
CPA Model 9900 DC Sputter Deposition System, w/ 4 ea ERA 5 KW DC sputtering power supplies, 2 ea CTI 8 and 1 ea CTI 10 cryo pumps, w/ pumps and chillers.
2
1 Ea
GSI R&D deposition system, for AMSi, amnual valving, Sierra mass flow controllers, MKS baratron controller, GP 307 vacuum gauge, 2 ea Balzers Model TPU 330 turbo pumps/TCP 310 controllers, ENI ACG-3 RF P/S, Leybold pump/blower package.
3
1 Ea
Leybold Model VZK A550 sputtering machine, w/ Huttinger Model IS 6 10KW RF Power supply, spare RF Generator.
4
1 Ea
Innotech sputterer customized: 486 industrial computer tied to PLC, CTI 8 cryo w/ compressor, RF Services automatch networks w/ controllers, approx 28" dia SS chamber, RGA port, Henry 10KW RF Power Supply, Advanced Energy Model RFX 1250 P/S, spare RF Generator.
5
1 Ea
Leybold Heraeus Model Ultratest F Leak Detector, automatic operation, diffusion pump.
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
If you don't find the product you came for, we set up another global communications vehicle so you can place the product you want to buy or want to sell thru our "Classified Ads Section". We believe this worldwide advertising for FREE or Extended can help our valued visitors get what they want. Please click on the following link.
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OLM Enterprises Semiconductor Equipment Resource Center