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C1: Semiconductor Equipment Support List

C2: Semiconductor Equipment List

C2A: Semiconductor Equipment List

C2B: Semiconductor Equipment List

C2C: Semiconductor Equipment List

Vacuum Pump List

C3: More Vacuum Pumps

C5B: New Vacuum Pumps

C4: Semiconductor Equipment, High Vacuum

C5A: Rebuilt He Leak Detectors

C6A: More Semiconductor Equipment

C6B: Furnaces & Film Measurement

C6C: Implanters, Sputterers, Steppers, Etc.

C6D: Wafer Track, Inspection, Transfer Systems, & More

C7A: Plasma Systems, Rebuilt

C7B: Vacuum, Systems, Pumps Power Supplies

C8: Vacuum Packaging Equipment

C9: Semiconductor Equipment, Used, Surplus

C10: Special Vacuum System

C11: Hardly Used R&D Semiconductor Equipment

C12: Laser Printing, Marking, Semiconductor and High Tech Equipment

C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab w/ Others

C14: Semiconductor Back End Equipment

C15: Parts & Semiconductor Back End Equipment

C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc.

C17: Used 8" Semiconductor Equipment

C18: He Leak Detectors, Vac Pumps, Turbo Balancing System

C18a: Vac Pumps, Semiconductor Equipment, Measurement System

C19: Helium Leak Detectors, RF Generator, Turbo Balancer

C20: Wafer Fab Equipment, Novellus Parts, Etc.

C21: Leybold Converters and Turbo Pumps

C22: Rebuilt Helium Leak Detectors and Vacuum Pumps

C23: 6" Semiconductor Equipment, Back End, Etc.

C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, Etc.

C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc.

C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc.

C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc.

C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc.

C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc.

C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc.

C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc.

C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc.

C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc.

C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc.

Applied Materials Parts List

R&D Semiconductor Equipment & Tegal Parts List

Equipment Images & Photos with Descriptions

Ion Implanter Parts & Services

Lam Systems Parts List

Mass Flow Controller List

Mass Flow Controller List, GR-2

Mass Flow Controller List, GR-3

MFC Related Equipment

Microscope and Accessory List

New Parts List

Precision Fluid Pumps

Related Equipment List

Test Systems & More Semi Equipment

Varian Parts List

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Wafer Fabs Available for Sale!!!

5 Inch Wafer Fab Line Available!!!
Capacity: 15 thousand wafers/mo, .8 um, CMOS
Please click here.

5 Inch Wafer Fab Equipment Available!!!
Please click here for list.

6 Inch Wafer Fab Line Available!!!
Capacity: 20 thousand wafers/mo, .5 um, CMOS
Please click here.

Note: All systems and fabs are subject to availability at time and date of inquiry.


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Semiconductor or Wafer Fab Equipment for Five Inch Wafers

Note 1: Original configuration is for 5 inch wafer. Some are convertible to 6 inches/other sizes.

Note 2: All equipment are store in clean/humidity-temperature controlled room.

Item # Ref # Equipment Name Manufacturer Model Size Original Acquisition Date
1 S01 G-Line Stepper Nikon NSR1505G3A   8803
2 S02 G-Line Stepper Nikon NSR1505G3A   8808
3 S03 G-Line Stepper Nikon NSR1505G4BK   9303
4 S04 G-Line Stepper Nikon NSR1505G4D   8802
5 S05 G-Line Stepper Nikon NSR1505G4D   9509
6 S06 G-Line Stepper Nikon NSR1505G6E 5,6 9809
7 S07 G-Line Stepper Nikon NSR1505G6E 5,6 9109
8 S08 G-Line Stepper Nikon NSR1505G7E   9009
9 S09 I-B38Line Stepper Nikon NSR1505i7A 5,6 0103
10 S10 Resist Coater and Developer DNS SKW-636BVP 5,6 9903
11 S11 Deep UV Curing System Ushio Electric UMA-802-H6   8802
12 S12 Deep UV Curing System Ushio Electric UMA-802-HC57MS 5,6 9201
13 S13 Character Exposure System Canon AIM-630 5,6 8708
14 S14 Lamp Annealing System DNS LAW-6L3-A   8801
15 S15 Lamp Annealing System DNS LAW-815 5,3 9503
16 S16 Dry Etcher Tokya Ohka OAPM-301B   8603
17 S17 Dry Etcher Tokya Ohka TCE-2600   9104
18 S18 Dry Etcher Tokya Ohka OPM-A1250   8802
19 S19 Dry Etcher Tokya Ohka OPM-A1200   8409
20 S20 Dry Etcher Tokya Ohka OAPM-A1200   8703
21 S21 Dry Etcher Alcantec MAS-801 5,6 9610
22 S22 Dry Etcher Alcantec MAS801-HR   0102
23 S23 Dry Etcher (Polysilicon) Hitachi M216A-2 5,6 9703
24 S24 Dry Etcher (Polysilicon) Tokyo Ohka OAPM-406   9409
25 S25 Dry Etcher (Polysilicon) Hitachi M216A-2   9703
26 S26 Dry Etcher (Oxide) TEL TE-5000 5,6 9703
27 S27 Dry Etcher (Oxide) TEL TE-4000   9703
28 S28 Dry Etcher (Oxide) TEL TE-8400S   9703
29 S29 Dry Etcher (Oxide) TEL TE-8400PE   9701
30 S30 Dry Etcher (Oxide) Tokyo Ohka OAPM-301B   8509
31 S31 Dry Etcher (Oxide) Anelva ILD-4003   8509
32 S32 Dry Etcher (Oxide) Anelva ILD-4013T   9503
33 S33 Dry Etcher (Metal) Hitachi M308AT   9011
34 S34 Plasma Etcher Tokyo Ohka OPM-A1200   8503
35 S35 Wafer Scrubber DNS SSW-636   9104
36 S36 Wafer Scrubber DNS SSW-627   9003
37 S37 Wafer Scrubber DNS SSW-629-B   9501
38 S38 Wafer Scrubber DNS SSW-636-B 3,4,5,6 8902
39 S39 Implanter (Medium Current) Nisshin Electric NH-20S 5,6 9203
40 S40 Implanter (Medium Current) Nisshin Electric SPCV1850U116-FL   9508
41 S41 Implanter (High Current) TEL/VARIAN 80/10   9502
42 S42 Implanter (High Current) AMAT PI9500   9506
43 S43 Implanter (High Current) Nisshin Electric NH-40SR   9309
44 S44 APCVD AMJ AMS-2100 5,6 8709
45 S45 APCVD AMAYA AEC-2260 5,6 9505
46 S46 PECVD ASM EECVD   8802
47 S47 Sputtering System, Aluminum TEL/VARIAN VARIAN-3180   9003
48 S48 Sputtering System, Aluminum TEL/VARIAN VARIAN-3180   9403
49 S49 Sputtering System, Aluminum Tokuda MFG CCS-1400   8909
50 S50 Diffusion Furnace, Horizontal TEL DL-8P-473-SDDC   9304
51 S51 Diffusion Furnace, Horizontal TEL DL-8P-473LT-SDDC   9503
52 S52 Mask Aligner Canon PLA-501FA   8709
53 S53 Coater Developer DNS SKW-636-BV 5,6 9309
54 S54 Coater Developer (Polyimide) DNS SCW-524-BVQ 3,4,5,6 8603
55 S55 Developer (Polyimide) DNS DVW-423A   8703
56 S56 Curing Oven Oshitari SCOX-1300-H   8603

Item # Ref # Equipment Name Manufacturer Model Size Original Acquisition Date
1 K69 Inspection Station Canon VIR-600 5,6 8703
2 K70 Wafer Particle Monitor System Hitachi Deco IS-1010   8909
3 K71 Wafer Particle Monitor System Topcon WM-3   8909
4 K72 Pattern Defect Review System KLA-TENCOR KLA2111   0103
5 K73 Pattern Defect Review System KLA-TENCOR KLA2131E   9610
6 K74 Overlay Measurement System KLA-TENCOR KLA5010   0109
7 K75 Al Film Thickness Measurement System KLA-TENCOR M-GAGE20   8509
8 K76 Al Film Thickness Measurement System KLA-TENCOR M-GAGE300   9201
9 K77 4 Point Probe Kokusai Electric VR-30A   8602
10 K78 Ellipsometer Rudolph Research 2C.4C   8601
11 K79 Ellipsometer Rudolph Research AUTO.EL 4,5,6 8509
12 K80 Ellipsometer Rudolph Research SS1,4D   8703
13 K81 Film Thickness Measurement System NANOMETRICS NANOSPECT/AFT   9509
14 K82 Film Thickness Measurement System NANOMETRICS NANOSPECT/AFT   8603
15 K83 X-ray Analysis System TECHNOS TREX610   9309
16 K84 FTIR System Nicolet Instruments ECO-8S   8801
17 K85 CD SEM Hitachi S-6000 5,6 8808
18 K86 CD SEM Hitachi S-7000   9009
19 K87 CD SEM Hitachi S-7080   9303
20 K88 CD SEM Hitachi S-6200H   9506
21 K89 CD Measurement System Nikon LAMPAS-M3 3,4,5,6 8603
22 K90 CD Measurement System Nikon LAMPAS-HD 3,4,5,6 9203
23 K91 Inspection Station Canon VIR-600 5,6 8603
24 K92 Parametric Test System Keithley S350   8503
25 K93 Wafer Particle Monitor System Hitachi HILIS-200 4,5,6 8703

If interested in one or more items, please click here.


New Parts for Novellus Systems

Item # OEM P/N Description Quantity
1 02-0093-00 One Arm Robot 4
2 15-00701-00 Bottom Fork Plate, 150 MM 10
3 15-00703-00 Top Fork Plate, 150 MM 10
4 16-033932-00 Pinned Showerhead Weldment, 150 MM 16
5 16-033931-00 Pinned Showerhead Weldment, 200 MM 16
6 02-029514-01 Left Indexer Assembly 1
7 02-029514-02 Right Indexer Assembly 1

If interested in one or more items,   please click here.


Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance

Schenck, Model VIBROTEST 41

Please click on the image below for enlarged photo

A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.

The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:

    Overall
    • Bearing vibration
    • Rolling element bearing condition (BEARCON)
    • Shaft vibration (X/Y)
    • Temperature
    • Process parameter

    Frequency Spectrum

    Balancing
    • One (1) plane
    • Two (2) planes

    Oscilloscope
    • Time trace

    Strobe

If interested,   please click here.


Rotary Polishing Wheel

Please click on the image below for enlarged photo

Mounted Felt Polishing Wheel

  • 3M Satin Finishing Material
  • Stainless steel material for 3/32" shank and related parts
    • Specifications:
      • 7/8 X 3/8 X 3/32
      • 7/8 X ¼ X 3/32

Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.


R & D High Technology Equipment

Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.

Item Equipment Model Notes Voltage/Current Dimensions
1 SK Vapor Dryer 51028 IPA Dryer 240V/70A 45W X 24D X 100H
2 AEP Stripper UC-7550 Flat Panel Stripper 208V/200A 74W X 50D 94H
3 O3 Detector IN 2000-3 Ozone Monitor 120V/1.5A N/A
4 Steag Wet Etch FPD-400 Wet Etch with Robot 208V/60A 71W X 51L X 65H
5 AKT RIE 1600-ETCH 2 Etch Chambers 208V/240A Cluster Tool
6 AKT PVD 1600-PVD 2 Sputter Chambers 208V/320A Cluster Tool
7 Steag Coater FPD 400 Resist Coater/Developer 208V/175A 115W X 82D X 73H
8 Tamarack T-300 Photo Lithography Tool 208V/15A 67W X 59D X 103H


Other Semiconductor Equipment List

    1. Vacuum System, equipped with vacuum chamber, turbo pump, roughing pump, gauges, controllers, & attachment for pressure transducers and mass flow controllers for repair & calibration purposes. This system has some flexibility for other applications.

    2. Mass Flow Controller Repair & Calibration Process Components:
      a. Digital Calibration System
      b. Volumetric Calibrator
      c. High Precision Multimeters
      d. Oscilloscope
      e. Ultrsonic Cleaners
      f. Vacuum Bake Oven
      g. Helium Leak Detector
      h. Gas feed system

    3. Helium Leak Detectors:
      a. Varian Helium Leak Detector, Model 938-41
      b. Leybold Helium Leak Detector, Model UltraTest F

    4. Pressure Transducer Calibration System, MKS
      Equipped with vacuum chamber with transducer tube adapters,
      turbo pump, roughing pump, throttle valve, gauges & controllers.

    5. VibroTest 41, Schenck
      A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.

    6. Vacuum Systems Mercury Gauge, McCleod

    7. Digital and Analog vacuum gauges

    8. Orbital Welding System, Dimetrics, Centaur '75', Model No. 293D

    9. High Precision stainless steel tube counter sink & tube square cutter

    10. Parts Inspection Microscopes

    11. High Precision Multimeters, Fluke, various models

    12. Oscilloscopes

    13. Bake Ovens

    14. Lab bench with Nitrogen purge clean parts storage

    15. Lab benches


If interested in one or more items,   please click here.

If you need Mass Flow Controllers, please click here.

If you need Vacuum Pumps, please click here.



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OLM Enterprises
Tel: (408)259-1900 Fax: (408)259-1990
Toll Free Tel/Fax: 1-888-925-8293

E-mail: webmaster@semiconweb.com


C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment | C15: Parts & Semiconductor Back End Equipment | C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment | C18: He Leak Detectors, Vac Pumps, Turbo Balancing System | C18a: Vac Pumps, Semiconductor Equipment, Measurement System | C19: Helium Leak Detectors, RF Generator, Turbo Balancer | C20: Wafer Fab Equipment, Novellus Parts, Etc. | C21: Leybold Converters and Turbo Pumps | C22: Rebuilt Helium Leak Detectors & Vacuum Pumps | C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc | C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online


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