High Precision Fluid Dispensing Pump, Models P2000 and P3000
P3000
P2000
The P3000 and P2000 programmable
dispensing systems are designed to incorporate EMS PACIFIC's
state-of-the-art pump technology into a highly efficient
pneumatic delivery configuration.
The P3000 system features EMS
PACIFIC's patented valveless piston-type pump technology
that delivers the highest level of accuracy, purity, and
chemical compatibility for precision dispensing
applications.
The P2000 uses the same drive/control
system as the P3000, but utilizes a check ball valve module.
Pharmaceutical, biotechnology,
semiconductor fabrication and assembly, medical dispensing,
food production . . . the P3000 and P2000 are designed for
virtually any manufacturing or laboratory environment where
repeatability and accuracy must be maintained. Both systems
can be fitted with 1/2" or 1" cylinder bore pump modules to
accommodate a variety of shot volume needs.
Note: All information
contained in this catalog is subject to engineering change
without notice.
P3000 SPECIFICATIONS
PUMP MODULE
PISTON DIA.
PRESETTABLE SHOT RANGE
FLUID PRESSURE, MAX
FLUID INLET TUBE DIA.
FLUID OUTLET TUBE DIA.
PP1608
0.5 in
0.5 - 2.9 ml
400 psig.
3/8 in
1/4 in
PP1616
1 in
3.5 - 11.5 ml
100 psig.
3/8 in
3/8 in
Valve Type
: Sliding
Viscosity
: 100,000 cp
Piston Stroke
: 1 in
Stroke Adjustment
: .001 Resolution Micrometer
Operating Cycle
: 60 cycles/min
Accuracy
: 99.9%
Repeatability
: 99.7%
Piston Material
: Alumina Ceramic
Wetted Material
: Polyethylene, 316SS, Ceramic, Viton, Teflon
Positive Pressure
: Minimum Effect
Pump Module Dimensions
: 2 x 17.5 in
Weight
: 7 lbs
Air Requirements
: 100 psi (max)
Electrical Requirements
: 110 VAC, 60Hz
Max. Pumps per System
: 12
Controllers
: SAC 1000
CLC 1000
CFC 1000
Repeatability is the measure of the
consistency of shot volume delivery, obtained by calculating the ratio of any shot volume
to the average shot volume of a particular pump stroke setting multiplied by 100.
Accuracy is determined by comparing actual shot volume to the
preset shot volume, calculated as the quotient of the actual shot volume to the preset
shot volume, multiplied by 100.
Data in website is based on tests performed using water as
the pumping media.
PATENT PENDING
Teflon® is a registered trademark of Dupont.
Viton® is a registered trademarks of DuPont Dow
Elastomers.
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R&D Semiconductor Equipment . . . For Sale!!!
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
8
Tamarack
T-300
Photo Lithography Tool
208V/15A
67W X 59D X 103H
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