Semiconductor Equipment and Parts Picture Gallery and Descriptions
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Please click on the thumbnail images to view enlarge photo.
HORIBA, STEC Mass Flow Controllers, Etc.
Item
Description
Images
Comments
1
Stec, SEC-7340MC-271, O2, 5 SLM
Like New
2
Stec, SEC-7340MO-SUC-369, He, 6 SLM
Like New
3
Stec Source System
Condition unknown
Item
Manufacturer
Model
Qty
Gas
Range
Comments
1
Horiba, Stec
SEC-7340RO-294
2
N2
10 SLM
In boxes.
Various models are available, please click request to inquire for other models.
Unit Instruments Mass Flow Controllers
Item
Description
Images
Comments
1
UFC-1260A, CL2, 50 SCCM
Like New
2
UFC-3550, H2, 200 SLM
New in orginal box.
3
UFC-1200A, HBR, 300 SCCM
Plastic Packed with Calibration Data Sheet. Three of same condition available.
Various models are available, please click request to inquire for other models.
MKS Instrument Products
Item
Description
Images
Comments
1
MKS Pressure Transducer Calibration System
Excellent condition. Equipped with turbo pump..
2
MKS Pressure Transducer, Type 627, Mdl 627A-11985, .1 Torr
Like new, 2 ea.
2A
MKS Pressure Transducer, Type 627, Mdl 627A11TBE, 10 Torr
Like new, 2 ea. View #2.
3
MKS Pressure Transducer, Type 623, Mdl 623A-11985, .1 Torr
Like new, 2 ea.
4
MKS Pressure Transducer, Type 122B, Mdl 122BA-00100EB & 122B-11993, .100 Torr
Clean, but condition unknown, 2 ea (1 of each model).
5
MKS Source System
Condition unknown.
6
MKS Throttle Valves, 253A-11247 (New KF-50)
Excellent condition. Photo model 253B-11203 (KF-40)
7
MKS Power Supply & Read Out, Type 24 6
Like new, 3 ea avaialable
Tylan Products
Item
Description
Images
Comments
1
Tylan, Source VI, Carrier: 20 SLM, H2; Source: 100 GR/MIN SIHCL4; Ratio: 200%; TEMP 21º C
This unit can be purchased as "rebuilt" or "as-is".
2
Tylan MFC calibrator, Mdl CAL401
2 Ea available. One almost new a & the other's condition is unknown.
3
Tylan Temperature Controller, Mdl HPC-120
Like new
Varian Systems Parts
Item
Description
Images
Comments
1
Varian Turbo Pump with vacuum chamber & accessories, some pc boards.
2 ea, unused
1A
Varian Turbo Pump with vacuum chamber & accessories, some pc boards. View #2.
2 ea, unused
2
Varian Multirange DC Sputtering Power Supply, 12Kw, 200/208Volts, P/N 0471679601
1 ea, unused
3
L8-004, Varian Heater Assembly, 4"
1 ea, unused, Also available in 3" and 5".
3A
L8-004, Varian Heater Assembly, 4"
1 ea, unused, Also available in 3" and 5". View #2
Varian Systems Parts List
Item
Description
Part Number
Serial Number
Qty
Comments
1
Match Network RF BIAS
P/N: 0068363002
S/N: FB-002
1
2
Axis Control Module
P/N: 1730099
S/N: 91E-134S
1
3
Accel Power Supply
P/N: 112241001
$nbsp;
1
4
High Voltage PS Assy, Mdl #PS1250
P/N: X405001005
S/N: 86D4-665
1
5
Power Supply
P/N: E19000460
S/N: 206
1
6
Heater Assembly, SST 5"
P/N: 0068599600
S/N: H9-006
1
7
Heater Assembly, 3"
P/N: 0068490000
S/N: K9-002
1
8
Etch Head Assembly
P/N: 0068505900
S/N: K9-001 & K9-002
2
9
Wafer Chuck, 4", L8-004
P/N: 00680-92401
S/N: H9-003
1
Please see photo above
10
Multi Range DC Sputtering PS, 12KW, 200/208VOLTS, for 3290
P/N: 0471679601
S/N:
1
Please see photo above
11
Process Interface
P/N: X470518401
S/N: B90-003
1
12
Accel PS Driver Assembly
P/N: 112236001
S/N:
1
Vacuum Pumps & Controllers
Item
Description
Images
Comments
1
Leybold Turbo Pump, Mdl TMP450
Used, clean.
2
Leybold Turbo Pump, Mdl TMP341MCT
3 ea, 2 rebuilt, one used
3
Leybold Turbo Pump, Mdl Turbovac 1000
2 ea, clean, condition unknown
4
Seiko-Seiki STP Control Unit, Mdl STP-1000C
Like new
5
Balzers-Pfeiffer, Turbo Pump with chamber and some accessories
1 ea, unused
6
Balzers-Pfeiffer, Turbo Pump with partial chamber and some accessories
1 ea, unused
7
Varian Turbo Pump with vacuum chamber & accessories, some pc boards.
2 ea, unused
7A
Varian Turbo Pump with vacuum chamber & accessories, some pc boards. View #2.
2 ea, unused
8
Alcatel turbo pumps, Mdl 5150 CP & 5204 CP
4 ea - Mdl 5150 CP; 1 ea - Mdl 5204 CP
8
Alcatel turbo pumps, Mdl 5150 CP
3 ea - Mdl 5150 CP in cases as shown.
8
Leybold turbo pumps, Mdl Turbovac 340 MCT, 360, and 361C
1 ea - Mdl Turbovac 340MCT, 1 ea - Mdl Turbovac 360, 2 ea - Turbovac 361C
RF Generators or Power Supplies
Item
Description
Images
Comments
1
AE (Advanced Energy) Mdl PE-1000-A, AC Plasma Source
4 ea, like new, with cables and controllers
2
DRYTEK RF Power Supply, Mdl PA1000
1 ea
Other Equipment and Parts
Item
Description
Images
Comments
1
Schenck Measurement & Turbo Balancing System
Never used except during the initial demo. This equipment alone is enough to setup a good business by a motivated individual.
2
Thermcraft, Inc., Mdl 2158-6-1ZH, S/N 884-11, Watts - 1030, Volts - 115/230, AMPS - 9/45, MAX TEMP - 1200
Imcomplete. Equipped with MDOT J.C. Schumacher source. Please see photo.
3
N/A, Custom
Manual basic vacuum system with NT360CSVtype Leybold turbo pump, Turbotronic NT150/360 controller, Grandville Phillips 275 convectron gauge & 340 vacuum gauge controller, roughing pump, manual valve system, and coolant recirculating system. Can be customized for R & D applications..
4
Mounted Polishing Wheel, 3M Satin Finishing Material
New, minimum volume order required.
5
AME Gas Panel with 12 Stec Mass Flow Controllers
Needs a little bit of care.
6
Pyrox Gas Panel with 10 Mass Flow Controllers and Flowmeters
2 ea, unused.
7
Unitek Bonding System
Condition unkown.
8
Climet Particle Analyzer, Mdl C1-208C
2 Ea available, condition unknown
9
Precision Balance, Christian Becker, Mdl EA-1
With protective cover, front glass broken.
10
Ganged micro valves and solenoids
Like new. For AME system.
11
LAM, 853-025807-001-E5, 853-025807-001-E6
Like new
12
Process, Varian Ionization Gauge, and Leybold Turbo Pump Controllers on Rack.
Good. Cabinet can hold more units of same size.
13
Ionization & TC Gauge Controller, Ulvac, Mdl PION-0302.
Like new, 2 ea
14
ERA RF Generator, Mdl HFP80005.
Condition unknown.
15
ASSOCIATE Evironmental Oven.
Very clean
16
Black Max Oven by Thermtec, Heating Element ID: 9-1/2", Length: 32", Temperature Gauge: 1300 deg C, 2350 deg F
Hardly used, very clean.
16A
Black Max Oven by Thermtec. View #2, Heating Element ID: 9-1/2", Length: 32", Temperature Gauge: 1300 deg C, 2350 deg F
Hardly used, very clean.
17
Powerformer, Power Transformer, Air Cooled, Cat #223-3257-120, KVA: 112.5, HZ: 60, High Voltage: 460, Low Voltage: 240/120 CT
Like new
18
Spin-Rinse-Dryer Rotors
3 ea: A72-50M, A72-50M-9798 F-04, A72-50M 3798D
19
Spot Welder, Hughes, Mdl: HRW-100B, 100 wat-second welding power supply.
Looks very good.
20
Nikon Microscope
Very Good. Part of a wafer inspection system.
Miscellaneous Parts
Item
Manufacturer
Model
Qty
Description
Comments
1
Edwards
PV16PKA O
1
Code No.: C41213000; Switch: 24V 0.25A
New. Application: LAM Systems.
2
Hewlett-Packard
HP Mass Selective Detector
1
N/A.
3
Spin-Rinse-Dryer Rotor
A72-50M, A72-50M-9798 F-04, A72-50M 3798D
3
Please see photo above..
Aera Mass Flow Controllers with Gas and Ranges Specified
Item
Manufacturer
Model
Qty
Gas
Range
Comments
1
Aera
FC-780C
2
H2
2 SLM
Like new.
2
Aera
FC-780C
2
N2
2 SLM
New in original boxes.
3
Aera
FC-980C
1
BCL3
100 SCCM
Like new.
Tylan Mass Flow Controllers with Gas and Ranges Specified
Item
Manufacturer
Model
Qty
Gas
Range
Comments
1
Tylan
FC-780C
1
N2
20 SCCM
Like new.
2
Tylan
FC-780C
1
N2
300 SCCM
Like new.
3
Tylan
FC 550-1
2
N2
300 SCCM
Very clean
4
Tylan
FC 550-2
1
H2
10 SLM
Very clean
Unit Instruments Mass Flow Controllers with Gas and Ranges Specified
Item
Manufacturer
Model
Qty
Gas
Range
Comments
1
Unit Instruments
UFC-1100A
2
H2
2 SLM
Like new with data sheet.
2
Unit Instruments
UFC-1100A
2
N2
10 SLM
Like new in box.
3
Unit Instruments
UFC-1200A
2
HBR
300 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. See item above for photo under Unit Instruments Mass Flow Controllers..
4
Unit Instruments
UFC-1200A
1
BCL3
200 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
5
Unit Instruments
UFC-1200A
1
O2
10 SCCM
Packed with Calibration Data Sheets by Manufacturer. In box. No photo.
6
Unit Instruments
UFC-1200A
1
CF4
20 SCCM
Like New.
7
Unit Instruments
UFC-1201A
1
O2
10 SCCM
Like New.
8
Unit Instruments
UFC-1201A
1
N2
10 SCCM
Like New.
9
Unit Instruments
UFC-1260A
1
CL2
50 SCCM
Like New
10
Unit Instruments
UFC-1260A
2
N2
100 SCCM
Like New
11
Unit Instruments
UFC-1260A
1
N2
5 SLM
Like New
12
Unit Instruments
UFC-1260A
1
H2
500 SCCM
Like New
13
Unit Instruments
UFC-1260A
1
Helium
1.5 SLM
Like New
14
Unit Instruments
UFC-1260A
1
Argon
50 SCCM
Like New
15
Unit Instruments
UFC-1260AU
2
H2
1 SLM
Like New
16
Unit Instruments
UFC-1268AU
1
H2
10 SLM
Like New
17
Unit Instruments
UFC-1160A
1
CL2
100 SCCM
Like New
18
Unit Instruments
UFC-1160A
1
BCL3
100 SCCM
With Manufacturer's Data Sheet. Like new.
19
Unit Instruments
UFC-1160A
1
H2
2 SLM
Like New
20
Unit Instruments
UFC-2000
1
O2
15 SLM
Very Clean
21
Unit Instruments
UFC-2550
3
H2
300 SCCM
Very Clean
22
Unit Instruments
UFC-2550
3
H2
300 SCCM
New in original box.
23
Unit Instruments
UFC-2550
2
N2
10 SLM
Very clean.
24
Unit Instruments
UFC-2550
2
HCL
10 SLM
Very clean.
25
Unit Instruments
UFC-2550
2
SiH2CL2
3 SLM
Very clean.
26
Unit Instruments
UFC-2550
2
SiH4
100 SCCM
Very clean.
27
Unit Instruments
UFC-2550
2
H2
1000 SCCM (1 SLM)
Very clean.
28
Unit Instruments
UFC-3000
1
H2
50 SLM
Very clean.
29
Unit Instruments
UFC-3550
1
H2
200 SLM
Very clean.
30
Unit Instruments
UFC-3550
1
H2
200 SLM
New in original box.
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