Semiconductor Equipment, High Vacuum Systems, Furnaces, Veeco Profiler, Novellus, Lam Systems Parts & Pumps
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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List
Please click on the links below to explore Systems configurations and other equipment for sale.
Note: All products are subject to availability at time and date of inquiry.
Veeco Profiler System
This system was received in August - October, 2001 brand new and has only been used for training purposes when initially received ( a total of about 2 hours). Total purchase cost was $142,374.29. Due to a change in product processing, it has never been used outside of training.
Profiler System Details:
NT-3300 Profiler system with computer
8 inch auto XY with 5 urn encoder/autoII
0.5X field of view lens
2.0X field of view lens
Quadruple turret motorized operation, position sensing
IX-10 interferometric objective
10 micron step height standard
Wafer vacuum chuck, 4 inch - 8 inch
Vacuum switch box
Please click on the stamp images below to see the various system views.
Semiconductor Equipment and High Vacuum Systems, Pumps, Furnaces, and More Hot List
Furnaces or Thin Film Equipment
Item
Model/Description
Qty
Condition
1
SVG 7000 TEOS System, 1993
1
Excellent
2
BTU Apogee +1 Oxide System
2
New, In Crate
3
Gemini II
1
Rebuilt, No Generator
4
Gemini II
1
"As-Is", No Generator
5
Gemini I
1
"As-Is", Touch Screen, No Generator
6
Gemini I
1
"As-Is", No Generator
Mass Flow Controller Power Supply & Control Unit
Item
Manufacturer
Model/Description
Qty
Condition
1
Brooks Instruments
0152E
8
Excellent
New Busch Vacuum Pumps
Item
Manufacturer
Model/Description
Qty
Serial No.
CFM
Condition
1
Busch
BB0021, .9 KW, 13A, 110V, 1PH, 60 HZ
1
C0019000142
21
New, no box
2
Busch
BA0250, 7.5 KW, 220/380V, 28.4/16.4A, 3 PH, 60HZ
1
PB03680101
250
New in Box
Won't last. Call for highly attractive prices.
New Arrivals, 05/10/00
Item
Model/Description
Manufacturer
Qty
Condition
1
A30W/Dry Pump
Ebara
1
New
2
D65BCS/WSU501 Pump Package
Leybold
3
Rebuilt
3
D65BCS/WSU501 Pump Package w/ Controller
Leybold
1
Rebuilt
4
M100S Dry Pump
Leybold
1
"As-Is" (Clean) or Rebuilt
5
E250 Piston Pump
Leybold
1
Rebuilt
6
DP80/EH250 Pump Package
Edwards
4
"As-Is" (Clean)
Wafer fab facility, semiconductor equipment, turbo, and cryo pumps:
Cryo Compressor, CTI Cryogenics
Model: 9600
Quantity: 2 Ea
Condition: New
Cryo Pump, CTI Cryogenics
Model: On-Board 10F
P/N: 8116051G003
S/N: RF9709128
New, in plastic, in crate, with manual. Complete with:
Roughing valve, TC gauge, On-Board control, and purge valve.
Edwards Rebuilt Dry Pumps, 6 Months Warranty:
Model QDP40 . . . 4 Ea
Model QDP40/QMB250 . . . 1 Ea
Model QDP80 . . . 1 Ea
Model QDP80/QMB250 . . . 1 Ea
Please click on Dry Pump and tell us how to reach you and which unit you are interested in.
Turbo Pumps:
Seiko-Seiki, Model STP H-1303CV2 . . . UNUSED.
Seiko-Seiki, Model STPH 1000C, with controller, cables, and accessories. New, factory sealed.
Alcatel, Model 1000C, new, with brand new controller and cables, not sealed or boxed.
Please click on Turbo Pump and tell us how to reach you and which unit you are interested in.
Wafer Fab For Sale:
6" Wafer Fabrication running with 0.8 micron linewidth, capable of doing 20,000 wafer with fifteen masking steps.
Buyer's benefit or advantage: Seller is willing to buy back current product for one year with a possible low volume thereafter.
Please click on 6" Wafer Fab and tell us how to reach you.
MRC Eclipse, Sputter System, Rebuilt
Model: Pre-Star
Serial No. 1031176
Year Mfg: 1989
Upgrade, 2/96: ENI SS RF generators, Soft-etch, onboard retrofit cryo diffuser ring, 8" cryo on loadlock, Ar purifier for system.
Process Chambers: 1 Etch and 3 Sputters
Hurry!!! System has never been used sinced purchased as rebuilt.
Total Invoice Amount was over a million dollars, call immediately for the best price!!!
You may click on MRC Eclipse and tell us how to reach you.
Varian Sputtering System
Model: 3180
Serial No.: 84340-257
Wafer Size: 4"
Major Components:
DC Power Supply, 12KW, 3 Ea
Fluke 1722B Instrument Controller
MKS Type 250B Controller
Eurotherm Heater Controllers, 3 Ea
Varian Wise Thin Film Monitor
HP 3438A Multimeter Film Thickness Monitor
Varian Wafer Process Controller
Varian Wafer Loader Controller
Varian Interlock & Control Chassis
Varian Conmag P/S Remote Monitor
Varian Vacuum System Controller
Varian 845 Vacuum Ionization Gauge
Varian RF Matching Controller
Varian Cassette Motor Controller
CTI Cryo On-Board Cryo Pump with Compressor
Leybold, D-30 Mechanical Pump
Hurry!!! Call for Price. Won't Last!!!
You may click on Varian 3180 and tell us how to reach you.
Applied Materials Etch System
Precision 5000 Mark II Etch
MxP Mainfram Etch System
Precision 5000 Mark II Etch MxP System Mainframe
Two Polysilicon/Polycide Etch UniChambers
Polycide MxP Etch Process Kit
Voltage/Frequency: 208 VAC, 60 hZ
Hurry!!! Call for price and more details.
You may click on Applied P-5000 and tell us how to reach you.
New Hot List
Tektronix, Metallic TDR, Model 1502C, New, 1 Ea
Turbo Pump, Seiko-Seiki, Model STP H1303CV2, New, 1 Ea
Vacuum Pump, Model iQDP80, Rebuilt, 1 Ea.
Vacuum Pump, Ebara, 65X40ERDM5M-NJ, 2 Ea.
Cryo Compressor, CTI, Model 9600, 2 Ea
Power Supply, ENI, Model OEM28B, Rebuilt, 1 Ea.
Chiller, AEC:
Model: NXGA-5Q S/N: 92J0452
Voltage: 460/3/60
Heat Transfer Fluid: 70% H2O, 30% Antifreeze
Refrigerant: R-22-10#
Minimum Temp: 20 deg F
Wafer Aligner, Canon 501FA, 4" setup, 3 Ea.
Leybold Sputtering Systems, 3 Ea:
Model BL550, 15 inch aluminum target, 2 systems are equipped with Model 450 turbo pumps, one system is equipped with cryo pump, all systems run RF Etch and Sputtering processes.
Nikon 8" Stepper, G-Line . . . Details upon request.
Nikon 8" Stepper, I-Line . . . Details upon request.
MRC, Eclipse, E350 . . . Details upon request.
Implanter, E1000 . . . Details upon request.
AME 7810, 7800, 7600. . . Available for buyer's configuration.
EPI Systems, Gemini III, RP, One Sided
AME 7600, 4", Running, As-Is . . . $20K
AME-7600, Completely Rebuilt . . . $228,000.00
Includes installation and start-up. Buyer's responsibility . . . Complete setup of facilities.
Balancing and Test Equipment, Schinck Vibrotest 41. Used only once for training demo.
Helium Leak Detector
Orbital Welding System
Digital Mass Flow Controller Calibration System and over 2,000 MFC's. Buy this with a helium leak detector, you can have a very profitable business. Contact us for details.
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OLM Enterprises Semiconductor Equipment Resource Center