Ion Implanter Parts and Services
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!! Please click here.
5 Inch Wafer Fab Equipment Available!!! Please click here for list.
6 Inch Wafer Fab Line Available!!! Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
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Ion Implanters for Liquidation, End User or Reseller Specials, Make Reasonable Offers
List and Descriptions
Eaton NV 3206
Medium Current
Quantity: 2 Ea
Serial Nos: 300 and 344
Varian 350D
Quantity: 1 Ea
Serial No. 00508570
Comes with 2 end stations: 5 inch and 4 inch
Software version 4.4.2.1
Eaton NV 10-80
High Current
Quantity: 1 Ea
Serial No. 0350245
All latest Eaton revisions included
5 Inch Clampless
Flood Gun 4 Power Supply
Turbo Pumped Source
Eaton NV 10-160, Rebuilt
Quantity: 2 Ea
Serial Nos: 11 and 52
One with 6 inch manual load and the other with 6 inch clampless AT4
Submit offer per system or entire package!!!
If interested, please click here.
Ion Implanter Parts and Services
Item
Application
Description
Price
Comments
1
NV-10 Analyzer Magnet Power Supply, E.M.I.
Complete Power Suppl, Tested & Calibrated
$11,995.00
Replaces the 3 Ea. H.P. originals
2
NV-10 Analyzer Magnet Power Supply, E.M.I.
Cable Kit, with instructions and plug/receptacle
$300.00
No comments
3
NV-10 Analyzer Magnet Power Supply, E.M.I.
New reduced height swing-out frame/rack
Call for prices
No comments
4
Eaton High Current
H.P. Analyzer Supplies, P/N 10065
$2,000.00
Repair/Exchange
5
Eaton Medium Current
Source baseplate with 2 removable feed-thrus
$875.00.00
Repair/Exchange
6
Eaton Medium Current
Removable feedthrus
$150.00 Ea.
No comments
7
Eaton Medium Current
Source can, source-to-can alighment, P/N 10064
$512.00
No comments
8
Universal Cooling Water Resistivity Monitoring System
Remote digital readout, sensor head with process flow adaptor, and power cable
$1,120.00 + tax
No comments
9
Eaton NV-6200/3206 Source Vacuum Monitoring System
Source H.C.I.G. Ion Gauge Controller w/ control cable, power cable, remote digital readout/panel mount, and gauge tube. $10,157.00
No comments
10
NV-10-160/180
Accel. Aperture Assy., Graphite, P/N 10063
$440.00
No comments
If interested, please click here.
Digital Scan NV6200 Spares
Interface computer and data links
Item #
Description
Axcellis Part No.
Page
Qty
1
Assembly, Interface Computer
0342-0707-4001
13-5
1
2
F1,2 digital I/O card
0342-0689-4001
13-09
1
3
F5 analog input interface card
0342-0681-4001
13-11
1
4
F7 A/D PCB mod
0342-0770-2001
13-13
1
5
F9 programmable counter PCB
0342-0720-4001
13-15
1
6
F10 programmable counter PCB
0342-0721-4001
13-17
1
7
F14 MPU PCB
0342-0772-3001
13-15
1
8
F16 Interface PCB
0342-0771-3001
13-21
1
9
Assy, Terminal controller processor PCB
0342-0918-0001R
8-67
3
10
Source terminal data link
0342-0906-0001
8-31
1
11
Assembly, magnet terminal data link
0342-0907-0001
8-11
1
A rack and PCB's
Item #
Description
Axcellis Part No.
Page
Qty
1
Assembly, "A Rack", Complete
Unkown
Section 3
1
2
A2 I/O relay driver PCB
0342-0160-4001
3-05
1
3
A3 I/O switch interface PCB
0342-0158-4001
3-07
1
4
A4 status display PCB
0342-0156-4001
3-09
1
5
A5-8 printer interface PCB
0342-0668-4001
3-15
1
6
A9 condition monitor PCB
0342-0050-4001
3-17
1
7
A10 hvps control PCB
0342-0576-4001
3-19
1
8
A12 system alarm PCB
0342-0175-4001
3-21
1
9
A13 accelerator alarm PCB
0342-0161-4001
3-23
1
10
A14 chamber vacuum control PCB
0342-0049-4001
3-25
1
11
A15 process control PCB
0342-0977-4001
3-27
1
12
A16 beam current amplifier PCB
5990-0097-4001
3-29
1
13
A17 beam current display driver PCB
0342-0138-4001
3-31
1
14
A18 beam current integrator PCB
0342-0408-4002
3-33
1
15
A19 scan generator PCB
0342-0607-4001
3-35
1
16
A20 system monitor interface PCB
0342-0679-3001
3-37
1
17
A24 end station vac control interface PCB
0342-1077-4001
3-37
1
H rack and PCB's
Item #
Description
Axcellis Part No.
Page
Qty
1
H1 isolation buffer PCB
0342-1033-4001
10-13
1
2
H3 input/output PCB
0342-0977-9001
10-17
1
3
H4 power input/output PCB
0342-1000-9001
10-20
1
4
H5, 7, 8, 10 stepper motor controller PCB
0342-0922-4001
10-25
5
5
H6, 9 buffer PCB
0342-0987-4001
10-29
2
6
High current motor driver PCB
0342-1027-0002
10-35
2
K rack and PCB's
Item #
Description
Axcellis Part No.
Page
Qty
1
K2 scan clock card
0342-1051-0001
4-25
1
2
K3 vertical scan generator card
0342-1049-0001
4-30
1
3
K4 horizontal scan generator card
0342-1050-0001
4-34
1
4
K5 scan system card
0342-1052-0001
4-39
5
5
K6 multi-function card
0342-1053-0001
4-43
1
6
K7 front panel I/O card
0342-1054-0001
4-47
1
Terminal PCB's
Item #
Description
Axcellis Part No.
Page
Qty
1
Vapourizer source control PCB
0342-0552-4001
8-47
1
2
Filament power supply PCB
0342-0601-4001
8-35
1
3
Magnet power supply regulator PCB
0342-0254-3001
8-09
1
4
Discharge power regulator DTC PCB
0342-1435-0001
8-39
1
5
Source gas servo amplifier PCB
0342-0910-4002
8-43
1
Item #
Description
Axcellis Part No.
Page
Qty
1
PSU, filament
0342-0854-4001
1
2
PSU AMAG
0342-1429-0002C
1
3
PSU AMAG
0342-1429-0001
1
8200 Spares
Item #
Description
Axcellis Part No.
Page
Qty
1
Scan Tilt DI (repaired)
1027-0102-0001
1
2
Amplifier, Servo, Brush
0261-0102-0001
1
If interested in one or more, or all of the items above, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
New Parts for Novellus Systems
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
Bearing vibration
Rolling element bearing condition (BEARCON)
Shaft vibration (X/Y)
Temperature
Process parameter
Balancing
One (1) plane
Two (2) planes
If interested, please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
3M Satin Finishing Material
Stainless steel material for 3/32" shank and related parts
Specifications:
7/8 X 3/8 X 3/32
7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested, please click here.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
8
Tamarack
T-300
Photo Lithography Tool
208V/15A
67W X 59D X 103H
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Precision Fluid Pumps | Equipment List | Lam Systems Parts List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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