Lam and Novellus Systems Parts for Semiconductor Equipment and High Technology Products
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Wafer Fabs Available for Sale!!!
5 Inch Wafer Fab Line Available!!! Please click here.
5 Inch Wafer Fab Equipment Available!!! Please click here for list.
6 Inch Wafer Fab Line Available!!! Please click here.
Note: All systems and fabs are subject to availability at time and date of inquiry.
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Novellus Concept One, Lam 4520i, KLA-Tencor Surfscan SP1, Axcelis-Eaton Ion Implanters GSD-200E and GSD-200EE, Varian 3190 Configurations and Equipment List
Please click on the links below to explore Systems configurations and other equipment for sale.
Novellus, Concept One, #734 System
Novellus, Concept One, #770 System
Novellus, Concept One, #852 System
Lam 4520i, ER
KLA-Tencor Surfscan, Model SP1, ER
Axcelis-Eaton, GSD-200EE, ER
Axcelis-Eaton, GSD-200E, MS
Varian Sputtering System, 5 Inch 3190
Significant Parts for Semiconductor Equipment
Significant Parts for Semiconductor Equipment #2
Lam Systems Parts List
Item
Part No.
Description
Qty
1
688-090733-001
Filter, RF Lowpass
1
2
713-000032-001
Bushing, Large Polyemide
9
3
713-011579-001
Housing Plunger
6
4
713-011980-001
Housing Plunger
6
5
713-013486-001
Pan, Drip Nozzle
1
6
713-013488-001
Block, Nozzle Mtg. L/H
1
7
713-013489-001
Block, Nozzle Mtg. R/H
1
8
713-021725-001
Bumer, Chemraz
5
9
714-002421-001
Shim for Reactor Chamber
14
10
714-008777-001
Baffle Scrn, Upper
2
11
714-013487-001
Bracket, Mtg.
2
12
714-220541-001
Box Flowmeter AMP Hot & Cold
1
13
715-001408-001
Electrode, Hard Anodized
1
14
715-002542-001
Rack, Guide Gate, LKG
4
15
715-006856-001
Mt Ball Screw
6
16
715-008067-001
Gate, Hard Anodized
2
17
715-009306-006
Focus Ring
1
18
715-011035-001
Plate, Lower End, Reaction Chmbr
1
19
715-011229-001
Plate, Seal, Exit Load Lock
1
20
715-011492-008
Holder,Wafer, 8" Stripper
1
21
715-011532-006
Plate, Upper Seal, 6" Elect
1
22
715-011665-006
Lower Elec Cap, 6" w/ Vent Grooved
1
23
715-011673-105
Cap, Lower Elect 5" Domed
1
24
715-011746-156B
Plate, W/C, 5", 0.020" Dome RDCD
4
25
715-011901-005
Lwr Baffle, Domed, 5" Electrode
1
26
715-011985-006
Cap, Lower Electrode, (Domed .025")
10
27
715-012101-004
Holder, Wafer, 4", Arm, Exit
1
28
715-012101-006
Holder, Wafer, 6", Arm, Exit
2
29
715-012101-008
Holder, Wfr Arm, Exit
1
30
715-012165-008
Holder, Wfr 8" Tght Pocket
1
31
715-012233-002
Gate (Hard Anodized) Inner Gat
1
32
715-013477-001
Plate, MTG
1
33
715-021494-001
Hinge, Process Chamber
2
34
715-028626-001
Plate, Upper Baffle, 6"
1
35
715-028699-013
Shower Head
1
36
715-032423-008
Cover, Bowl, Rinse
1
37
716-006446-001
Diffuser Cathode
1
38
716-011563-151
Domed, W/C 1.5mm Cover w/ Pins
1
39
716-011563-152
5" Domed, W/C (1.5mm Cover w/ Pins)
1
40
716-011572-001
Clamp, Retainer, 1/4 Turn
3
41
716-028668-251
Plate, TP Wfr Clamp DMD Shadow
1
42
716-028668-281
Plate, Lower Wfr Clamp, 8" Shad
1
43
718-092326-081
1
44
718-092326-082
Assy, ESC DG#LA8PPF
1
45
720-000930-008
SCR, SCH Cap, 6-32
4
46
720-000940-005
SCR, SCH Cap, 8-32 2AX5
2
47
720-000940-005
SCR, SCH Cap, 8-32
4
48
721-000936-001
Wshr, FLT, #6
2
49
721-000936-002
Wshr, LK, #6
2
50
721-000946-001
Wshr, FLT, #8
4
51
721-000946-002
Wshr, LK, #8
4
52
754-091624-001
Spring, Compression
6
53
765-008372-001
Encoder Shaft
2
54
766-009593-002
Reg, Press, Teflon
1
55
766-090814-001
Actuator Assy, N.C.
1
56
766-090815-001
Actuator Assy, N.O.
32
57
766-091250-006
Valve, Nupro, 1/4" Swagelock
2
58
768-006970-001
Switch, Vac 724 Torr
2
59
768-091910-001
Switch, Vac 5 Torr Gauge
2
60
770-007494-001
Cyl Arm Dr 3/4 Bore ISTR
1
61
770-009005-001
Cyl, 1-5/8 Bore X 2-3/4 STR
1
62
771-090453-001
Convectron Tube, 1/4" VCR
1
63
771-092520-002
Flwmtr, DI, Tntlm FLT, U82M1/M
2
64
796-007432-101
Generator, Vacuum
2
65
796-009933-001
Conn, Male, 7/16-20 VCR
1
66
796-090059-001
Ftg, Conn, Male, ULTR, .25TB
1
67
796-092914-001
Ftg, 1/4" Nom Ultra Torr
52
68
810-002896-001
Assy, PCB, Conv Tube Interface
1
69
839-014432-101
Weldmt, Tee Filter
5
70
839-021878-001
Base, Elect, Air Cooled ISO
1
71
839-024377-100
Weldmt, Downstream Sup - UQT
1
72
853-004197-001
Assy, Delay Valve
1
73
853-011141-003
Assy, Brake, RF Gap
1
74
853-012095-006
Assy, Exit Arm 6" WT
1
75
853-017631-001
Assy, Vac Sw 714.5 Torr
1
76
853-017643-001
Assy, Manometer
3
77
853-021635-003
Assy, Manometer LL Stripper
1
78
853-031685-002
Assy, Upper Match
1
79
856-010345-006
Kit, Ret Wafer Kit, 6" ISO
1
80
856-025067-161
Kit, Retrofit, Esc 8", 4720
1
81
920-090916-003
Conn, Blkhead
2
82
921-009590-003
Adaptor, 1/4T x 1/8NPT
2
83
955-009576-003
Teflon Tube, 0.250 O.D. x 0.187 I.D.
1
New Parts for Novellus Systems
Item #
OEM P/N
Description
Quantity
1
02-0093-00
One Arm Robot
4
2
15-00701-00
Bottom Fork Plate, 150 MM
10
3
15-00703-00
Top Fork Plate, 150 MM
10
4
16-033932-00
Pinned Showerhead Weldment, 150 MM
16
5
16-033931-00
Pinned Showerhead Weldment, 200 MM
16
6
02-029514-01
Left Indexer Assembly
1
7
02-029514-02
Right Indexer Assembly
1
If interested in one or more items, please click here.
Measurement Instrument or System for Machine Diagnostics and Predictive Machine Maintenance
Schenck, Model VIBROTEST 41
Please click on the image below for enlarged photo
A good business can be established with this equipment. Contact us for details. Basically new. Never been used except for the first time demonstration by the Schenck's Engineer. A "must" for high speed balancing in a "Turbo Pump Repair" business and other applications.
The VIBROTEST 41 is a portable, battery operated, lightweight measuring instrument that can make the following measurements:
Overall
Bearing vibration
Rolling element bearing condition (BEARCON)
Shaft vibration (X/Y)
Temperature
Process parameter
Balancing
One (1) plane
Two (2) planes
If interested, please click here.
Rotary Polishing Wheel
Please click on the image below for enlarged photo
Mounted Felt Polishing Wheel
3M Satin Finishing Material
Stainless steel material for 3/32" shank and related parts
Specifications:
7/8 X 3/8 X 3/32
7/8 X ¼ X 3/32
Minimum volume required to order this product. Packed or unpacked. Packing may be specified by buyer.
If interested, please click here.
R&D Semiconductor Equipment For Sale
Note: The following equipment were purchased new are slightly used for R&D application only. The number of substrates processed is very minimal, so, all equipment are in very good condition. Ages are more or less 5 years old.
Item
Equipment
Model
Notes
Voltage/Current
Dimensions
1
SK Vapor Dryer
51028
IPA Dryer
240V/70A
45W X 24D X 100H
2
AEP Stripper
UC-7550
Flat Panel Stripper
208V/200A
74W X 50D 94H
3
O3 Detector
IN 2000-3
Ozone Monitor
120V/1.5A
N/A
4
Steag Wet Etch
FPD-400
Wet Etch with Robot
208V/60A
71W X 51L X 65H
5
AKT RIE
1600-ETCH
2 Etch Chambers
208V/240A
Cluster Tool
6
AKT PVD
1600-PVD
2 Sputter Chambers
208V/320A
Cluster Tool
7
Steag Coater
FPD 400
Resist Coater/Developer
208V/175A
115W X 82D X 73H
8
Tamarack
T-300
Photo Lithography Tool
208V/15A
67W X 59D X 103H
If interested in one or more items, please click here.
If you need Mass Flow Controllers, please click here.
If you need Vacuum Pumps, please click here.
Please contact us at:
OLM Enterprises
E-mail: webmaster@semiconweb.com
C1: Semiconductor Equipment Support List | C2: Semiconductor Equipment List | C2A: Semiconductor Equipment List | C2B: Semiconductor Equipment List | C2C: Semiconductor Equipment List | Vacuum Pump List | C3: More Vacuum Pumps | C5B: New Vacuum Pumps | C4: High Vacuum Systems | C5A: Rebuilt He Leak Detectors | C6A: More Semiconductor Equipment | Furnaces & Film Measurement | C6C: Implanters, Sputterers, Steppers, Etc. | C6D: Wafer Track, Inspection, Transfer Systems, & More | C7A: Rebuilt Plasma Systems | C7B: Vacuum Systems, Pumps, Power Supplies | C8: Vacuum Packaging Equipment | C9: Semiconductor Equipment, Used, Surplus | C10: Special Vacuum System | C11: Hardly Used R&D Semiconductor Equipment | C12: Laser Printing, Marking, Semiconductor and High Tech Equipment | C13: Semiconductor Equipment for Eight Inch (8") Wafer Fab | C14: Semiconductor Back End Equipment |
C15: Parts & Semiconductor Back End Equipment |
C16: Ellipsometers, Particle Counter, Probe Station, Auto Scriber, Etc. | C17: Used 8" Semiconductor Equipment |
C18: He Leak Detectors, Vac Pumps, Turbo Balancing System |
C18a: Vac Pumps, Semiconductor Equipment, Measurement System |
C19: Helium Leak Detectors, RF Generator, Turbo Balancer |
C20: Wafer Fab Equipment, Novellus Parts, Etc. |
C21: Leybold Converters and Turbo Pumps |
C22: Rebuilt Helium Leak Detectors & Vacuum Pumps |
C23: 6" Semiconductor Equipment, MSGrp, Back End, Etc |
C24: Wafer Saw, Handlers, Probers, Parts, 6" Wafer Fab Equipment, MSGrp, Etc | C25: Pre-owned, Used or Surplus HYGT Semiconductor Equipment and Back End Equipment , Etc. | C26: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26A: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C26B: Four Inch (4") Used, Surplus, Rebuilt, or Pre-owned Semiconductor or Wafer Fab Equipment, Etc. | C27: Six Inch (6") Semiconductor or Wafer Fab Equipment Package, Etc. | C28: Surplus Semiconductor Equipment: Ion Implanters, Kokusai & TEL Furnaces, Resistivity Meter, Parts, Etc. | C29: Surplus, Used, Rebuilt Semiconductor Equipment: Ion Implanters, Furnaces, Testers, Parts, Etc. | C30: Semiconductor Equipment: Ion Implanter, Furnaces, Wafer Steppers, Parts, Etc. | C31: Used and Refurbished Semiconductor Equipment: Ion Implanter, Furnaces, Resistivity Meter, Parts, Etc. | C32: Surplus, Rebuilt Semiconductor Equipment: Novellus 3290, Applied Materials Centura HP PVD, & Sputtered Films Inc 8600, Etc. | Equipment Images & Photos | Mass Flow Controller List, GR-1 | Mass Flow Controller List, GR-2 | Mass Flow Controller List, GR-3 | MFC Related Equipment List | Applied Materials Parts List | Ion Implanter Parts & Services | Precision Fluid Pumps | Equipment List | R&D Semiconductor Equipment & Tegal Parts List | Varian Parts List | Microscope & Accessory List | New Parts List | Related Equipment List | Test Systems & More Semi Equipment | Online Resources | Online Affiliates | Want List | Want List, G-2 | Want List, G-3 | Hot List Sale | Health Concerns | Advertise Worldwide Online
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OLM Enterprises Semiconductor Equipment Resource Center
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