CD SEM, Hitachi S-8840

• Wafer size: 8 inches
• Image Resolution: X110 (optical microscope)
• X1,000 - 150,000 (sem image)
• Meas. Mode: automatic edge detection, definable algorithms
• Meas. Range: 0.1 - 10 micrometer
• Reproducibility: +-1% or 5 nanometer (3 sigma) whichever is greater
• Objective lens: highly excited low abberation type
• Movement: 200 mm X 200 mm
• Speed: 50 nm/sec
• Auto Loader: 2 cassette random access
• Automatic wafer alignment using optical microscope
• Throughput: 20 wafers/hr (5 pt meas. Continuous operation)
• Vacuum System: Fully automatic dry vac system with 3 ion pumps, 2 turbo pumps and 2 rotary pumps

Conversion to 6 inch wafers . . . . . Option

Reference: Stxi813-S8840

Please call or   click here  to inquire for prices. Please include reference.

Note: Subject to availability at time and date of inquiry.

Refurbished Semiconductor Equipment, SEM, Scanning Electron Microscopes, KLA Measurement Systems, Etc.

• Hitachi S-2700 Lab 6 SEM
• Hitachi S-806C FE-SEM with EDS system (Oxford X-Ray) and infrared chamberscope, very good condition, 8 inch wafer capable
• Hitachi S-6000 CD-SEM, with new proprietory PC and software
• Hitachi S-8640 CD-SEM for R-W head and mask reticle inspection, High throughput
• Hitachi S-8820 CD-SEM
• Hitachi S-4500 FE-SEM
• Hitachi S-6280 CD-SEM
• Hitachi S-570 SEM with LAB6 source
• SEMTRONIX 791 RIE with 6 process gases, can be used for delayering 12 inch wafers or any wafer size & package
• KLA 5000 CD-SEM measurement system
• KLA 5107 Overlay inspection system
• KLA 5100 Overlay inspection system
• KLA 2131E Defect inspection system
• MICRION 9800 Focused Ion Beam FOR 8 inch wafer, good for cross section in micro area
• Perkin-Elmer 660 Auger Electron Microscopy, like new
• ALESSI 2100 probe station
• LEITZ Ergoplan 200 Laser microscope, auto focus
• JEOL JSM-ICA848A SEM wafer inspection system
• JEOL FIB 500 Focused Ion Beam Milling System
• JEOL 100CX TEM
• JEOL 840 Field Emission SEM
• JEOL 5600 SEM
• JEOL 1010 TEM
• JEOL 6340 Field Emission SEM + Noran Voyager X-Ray
• JEOL 4000 EX TEM 400 kv
• JEOL 200 CX TEM 200 kv
• JEOL 1200 EX TEM 120 kv
• JEOL FX-90Q NMR + Tecmag
• JEOL T330 SEM
• FEI 300 Focus Ion Beam
• PHI 600 Scanning Auger with PC upgrade
• PHI 670 Hres Scanning Auger system
• PHI 5200 XPS System Based on PHI 10-360 SCA
• PHI 660 Scanning AES system with PC Upgrade
• MRC Summit Inline Sputtering System
• 3500 SIMSII Dynamic SIMS, includes 06-600 Spherical SIMS Energy analyzer, 1-255AMU RF generator, 16mm Quadrupole, 32-055 SIMS controller, 32-600 Quadrupole control, 02 leak valve, 1120 amplifier discriminator, all cables and manuals
• VG 310 XPS, AES
• ISI 193 Mcrostep stepper, 193 nm with spare Cymer Laser
• Dynatex DX III Scriber, Windows Operating System
• LEEDS 10-180 & 11-020 controller. This unit has been used only once, and has been stored under vacuum
• Semitool 860D Spin-Rinse-Dryer
• Semitool 870D Spin-Rinse-Dryer
• EDAX EX-4 EDS system for conventional SEM

Reference: Stxi7133a

If interested in any item above, please click here. Please include reference.

Note: All products are subject to availability at time and date of inquiry.

Reference: Stxi7133b

Item	Manufacturer	Model	Details	Qty	Comments	Click Image for Photo
1	Horiba	SEC-7340MO-SUC-369	Gas - He, Flow Range - 6 SLM, Fittings - ¼" VCR, Male I/O	1	Like New
2	Horiba	SEC-7340MC-271	Gas - O2, Flow Range - 5 SLM	1	Like New
3	Unit Instruments	UFC-1200A	Gas - HBR, Flow Range - 300 SCCM	1	Plastic Packed with Calibration Data Sheet. Three of same condition available. Please see table below.
4	Unit Instruments	UFC-1260A	Gas - CL2, Flow Range - 50 SCCM	1	Metal Seals. Like New.
5	MKS	1150B-158K-SP014-90	Gas - TEOS, Flow Range - 50 SCCM	1	Condition Unknown.
6	Tylan	Source VI	Carrier: 20 SLM, H2; Source: 100 GR/MIN SIHCL4; Ratio: 200%; TEMP 21º C	2	This unit can be purchased rebuilt or "as-is".

Item	Manufacturer	Model	Details	Qty	Comments	Click Image for Photo
1	Thermcraft, Inc.	Mdl: 2158-6-1ZH, S/N 884-11	Watts - 1030, Volts - 115/230, AMPS - 9/45, MAX TEMP - 1200	1	Imcomplete. Equipped with MDOT J.C. Schumacher source. Please see photo.
1	N/A	Custom	Manual basic vacuum system with 340 type turbo pump, roughing pump, valve system, and turbo pump and ionization gauge controllers. Can be customized.	1	Please see photo.

• 3M Satin Finishing Material
• Stainless steel material for 3/32" shank and related parts
  • Specifications:
    • 7/8 X 3/8 X 3/32
    • 7/8 X ¼ X 3/32

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Semiconductor Equipment Resource Center

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